Self-Diffusion in Extrinsic Silicon Using Isotopically Enriched ^<30>Si Layer : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-03-01
著者
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和田 健司
大阪府立大学工学研究科
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Matsumoto Satoru
Department of Cardiology, Toyonaka Municipal Hospital
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Abe Takumi
Department Of Advanced Materials Science Graduate School Of Frontier Sciences University Of Tokyo
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AKAI Tomonori
Department of Advanced Materials Science, Graduate School of Frontier Sciences, University of Tokyo
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室田 淳一
東北大学
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室田 淳一
東北大学 電気通信研究所
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SAITO Keisuke
Application Laboratory
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Saito Keisuke
Application Laboratory Analytical Division Philips Japan Ltd.
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Saito K
Institute Of Industrial Science University Of Tokyo
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WADA Kazumi
Department of Materials Engineering, Graduate School of Engineering The University of Tokyo
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Matsumoto S
Faculty Of Science And Technology Keio University
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Matsumoto Satoru
Department Of Electronics And Electrical Engineering Keio University
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Abe Takao
Isobe R&d Center Shin-etsu Handotai
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Wada K
Osaka Prefecture University
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Wada K
Hokkaido Univ. Sapporo Jpn
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NAKABAYASHI Yukio
Department of Electronics and Electrical Engineering, Keio University
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OSMAN Hirman
Department of Electronics and Electrical Engineering, Keio University
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SEGAWA Toru
Department of Electronics and Electrical Engineering, Keio University
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SAITO Kazumasa
Department of Electronics and Electrical Engineering, Keio University
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MUROTA1 Junichi
Research Institute of Electrical Communication, Tohoku University
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ABE Takao
lsobe R&D Center Sin-Etsu Handotai
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OSAMAN Hirman
Department of Electronics and Electrical Engineering, Keio University
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Saito Kenichi
Institute Of Industrial Science University Of Tokyo
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Osaman Hirman
Department Of Electronics And Electrical Engineering Keio University
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Wada Kazuhiro
Department Of Nuclear Engineering Faculty Of Engineering Kyoto University
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Saito Kunio
Ntt Microsystem Integration Laboratories
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Wada Kazumi
Department Of Materials Engineering Graduate School Of Engineering The University Of Tokyo
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Segawa Toru
Department Of Electronics And Electrical Engineering Keio University
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Matsumoto S
Ntt Telecommunications Energy Laboratories
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Matsumoto S
Department Of Electronics And Electrical Engineering Keio University
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Saito Kazumasa
Department Of Electrical Engineering Keio University
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Saito K
Akita Univ. Akita Jpn
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Wada Kazumi
Atsugi Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Abe Takao
Lsobe R&d Center Sin-etsu Handotai
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Saito Keisuke
Application Laboratory Bruker Axs
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Nakabayashi Y
Department Of Electronics And Electrical Engineering Keio University
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Saito Kaichi
Kanagawa Industrial Technology Center
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