The Distribution of the Excess Vacancies in the Bulk at the Diffusion of Phosphorus into Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1977-07-05
著者
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Matsumoto Satoru
Department of Cardiology, Toyonaka Municipal Hospital
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NAKAMURA Hiroaki
Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation
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Arai Eisuke
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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Arai Eisuke
Musashino Electrical Communication Laboratory
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NIIMI Tatsuya
Department of Electrical Engineering, Faculty of Engineering, Keio University
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Niimi Tatsuya
Department Of Applied Physics Tokai University
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Nakamura Hiroaki
Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation
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