Chemical Vapor Deposition of Cu Film on SiO_2 Using Cyclopentadienylcoppertriethylphosphine

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1992-12-15

著者

• Matsumoto Satoru

  Department of Cardiology, Toyonaka Municipal Hospital

• Matsumoto Satoru

  Department Of Electronics And Electrical Engineering Keio University

• HIGUCHI Hirofumi

  Bentec Corporation

• Matsumoto S

  Ntt Telecommunications Energy Laboratories

• Yoshida N

  Keio Univ. Yokohama

• CHICHIBU Shigefusa

  Department of Electrical Engineering, Faculty of Science and Technology, Keio University

• YOSHIDA Nobuhide

  Department of Electrical Engineering, Faculty of Science and Technology, Keio University

• Chichibu S

  Institute Of Applied Physics University Of Tsukuba

• Chichibu S

  Institute Of Applied Physics And Graduate School Of Pure And Applied Sciences University Of Tsukuba

• Chichibu Shigefusa

  Department Of Electrical Engineering Keio University

• Higuchi H

  Matsushita Battery Industrial Co. Ltd. Osaka Jpn

• YOSHIDA Nobuhide

  NEC Corporation

• Yoshida Nobuhide

  Department Of Electrical Engineering Faculty Of Science And Technology Keio University:(present Addr

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