Application of Reversed Silicon Wafer Direct Bonding to Thin-Film SOI Power Ics

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概要

• 論文の詳細を見る
• 1997-09-16

著者

• Sasaki Tatsuo

  Ntt Telecommunications Energy Laboratories

• SAKAI Tatsuo

  Departments of Neurosurgery, Tokyo Metropolitan Ohkubo Hospital

• Sakai T

  Ntt Telecommunications Energy Laboratories

• Matsumoto S

  Faculty Of Science And Technology Keio University

• Matsumoto Satoru

  Department Of Electronics And Electrical Engineering Keio University

• Sakai T

  Dainippon Screen Manufacturing Co. Ltd. Kyoto Jpn

• HIRAOKA Yasushi

  NTT Telecommunications Energy Laboratories

• ISHIYAMA Toshihiko

  NTT Integrated Information & Energy Systems Laboratories

• MATSUMOTO Satoshi

  NTT Intefrated Information & Energy Systems Laboratories

• HIRAOKA Yasushi

  NTT Integrated Information & Energy Systems Laboratories

• SAKAI Tatsuo

  NTT Integrated Ingormation & Energy Systems Laboratories

• YACHI Toshiaki

  NTT Integrated Information & Energy Systems Laboratories

• ITOH Akio

  Fujitsu Laboratories Ltd.

• ARIMOTO Yoshihiro

  Fujitsu Laboratories Ltd.

• Ishiyama Toshihiko

  Ntt Integrated Information & Energy Systems Laboratories

• Itoh A

  Ricoh Co. Ltd. Miyagi Jpn

• Matsumoto S

  Ntt Telecommunications Energy Laboratories

• Yachi T

  Ntt Telecommunications Energy Laboratories

• Yachi Toshiaki

  Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

• Ishiyama T

  Ntt Telecommunications Energy Lab. Tokyo Jpn

• Itoh A

  Fujitsu Laboratories Ltd.

• ARIMOTO Yoshihiro

  System LSI Development Labs., FUJITSU LABORATORIES LTD.

• Arimoto Y

  System Lsi Development Labs. Fujitsu Laboratories Ltd.

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