Application of Reversed Silicon Wafer Direct Bonding to Thin-Film SOI Power ICs

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1998-03-30

著者

• Sasaki Tatsuo

  Ntt Telecommunications Energy Laboratories

• SAKAI Tatsuo

  Departments of Neurosurgery, Tokyo Metropolitan Ohkubo Hospital

• Sakai T

  Ntt Telecommunications Energy Laboratories

• Matsumoto S

  Faculty Of Science And Technology Keio University

• Matsumoto Satoru

  Department Of Electronics And Electrical Engineering Keio University

• Sakai T

  Dainippon Screen Manufacturing Co. Ltd. Kyoto Jpn

• HIRAOKA Yasushi

  NTT Telecommunications Energy Laboratories

• ISHIYAMA Toshihiko

  NTT Integrated Information & Energy Systems Laboratories

• MATSUMOTO Satoshi

  NTT Intefrated Information & Energy Systems Laboratories

• HIRAOKA Yasushi

  NTT Integrated Information & Energy Systems Laboratories

• SAKAI Tatsuo

  NTT Integrated Ingormation & Energy Systems Laboratories

• YACHI Toshiaki

  NTT Integrated Information & Energy Systems Laboratories

• YAMADA Ichiro

  NTT Integrated Information & Energy Systems Laboratories

• ITOH Akio

  Fujitsu Laboratories Ltd.

• ARIMOTO Yoshihiro

  Fujitsu Laboratories Ltd.

• Ishiyama Toshihiko

  Ntt Integrated Information & Energy Systems Laboratories

• Itoh A

  Ricoh Co. Ltd. Miyagi Jpn

• Matsumoto S

  Ntt Telecommunications Energy Laboratories

• Yachi T

  Ntt Telecommunications Energy Laboratories

• Yachi Toshiaki

  Musashino Electrical Communication Laboratory Nippon Telegraph And Telephone Public Corporation

• Ishiyama T

  Ntt Telecommunications Energy Lab. Tokyo Jpn

• Itoh A

  Fujitsu Laboratories Ltd.

• ARIMOTO Yoshihiro

  System LSI Development Labs., FUJITSU LABORATORIES LTD.

• Arimoto Y

  System Lsi Development Labs. Fujitsu Laboratories Ltd.

• Yamada Ichiro

  Ntt Integrated Information & Energy Systems Laboratories

関連論文

• Giant Unruptured Aneurysm of the Vertebral Artery Presenting with Rapidly Progressing Bulbar Compression : Case Report
• Infected Subdural Effusion Associated with Resolving Subdural Hematoma : Case Report
• Evolution of Chronic Subdural Hematoma after Burr-hole Exploration for Subdural Effusion : Case Report
• Ultrafine Microneurosurgical Instruments : Technical Note
• Vertebral Artery Aneurysm at the Level of the Cervicomedullary Junction : Case Report
• Fabrication and Electrical Characteristics of Single Electron Tunneling Devices Based on Si Quantum Dots Prepared by Plasma Processing ( Quantum Dot Structures)
• Ferroelectric Property of a- /b-Axis- Oriented Epitaxial Sr_Bi_Ta_2O_9 Thin Films Grown by Metalorganic Chemical Vapor Deposition : Electrical Properties of Condensed Matter
• Fraction of Interstitialcy Component of Phosphorus and Antimony Diffusion in Silicon
• Fraction of Interstitialcy Component of Phosphorus and Antimony Diffusion in Silicon
• Planar-Doping of Molecular Beam Epitaxy Grown ZnSe with Plasma-Excited Nitrogen
• Nitrogen Doping of ZnSe and ZnCdSe with the Assistance of Thermal Energy and Photon Energy
• Self-Diffusion in Intrinsic and Extrinsic Silicon Using Isotopically Pure ^Silicon/Natural Silicon Heterostructures
• Self-Diffusion in Extrinsic Silicon Using Isotopically Enriched ^Si Layer : Semiconductors
• Epitaxial Growth of Pure ^Si Layers on a Natural Si(100) Substrate Using Enriched ^SiH_4
• Determination of Molecular Orientational Distribution Using Surface Second-Harmonic Generation Analyzed by the Five-Layer Model and the Modified Maximum -Entropy Method
• Orientation of Liquid Crystal Molecules on Side-Chain Polyimide Alignment Layer Studied by Second-Harmonic Generation Interferometry
• Fabrication of Nanocrystalline Silicon with Small Spread of Particle Size by Pulsed Gas Plasma ( Quantum Dot Structures)
• Cu-Zn/Al_2O_3/Al-Plate Catalyst for a Methanol Reformer
• Exciton-Related Photoluminescence in 4H-SiC Growm by Step-Controlled Epitaxy
• Step-Controlled Epitaxial Growth of 4H-SiC and Doping of Ga as a Blue Luminescent Center
• A Highly-Efficient Tungsten-Polycide Gate Radio-Frequency Power Metal-Oxide-Semiconductor Field-Effect-Transistor Using Bonded Silicon-on-Insulator Technology
• Investigation on the Fully-and Partially-Depleted Thin-Film Silicon-on-Insulator Power Metal-Oxide-Semiconductor Field-Effect-Transistors for High-Frequency Applications
• Application of Reversed Silicon Wafer Direct Bonding to Thin-Film SOI Power ICs
• Application of Reversed Silicon Wafer Direct Bonding to Thin-Film SOI Power Ics
• Failure Analysis and New Design of a Thin-Film Silicon-on-Insulator Power Metal-Oxide-Semiconductor Field-Effect Transistor Based on Emission Microscopy and 2-Dimensional Device Simulation
• Switching Characteristics of a Thin Film SOI Power MOSFET
• Ti Salicide Process for Subquarter-Micron CMOS Devices (Special Issue on Quarter Micron Si Device and Process Technologies)
• Heteroepitaxial Growth of CuGaS_2 Layers by Low-Pressure Metalorganic Chemical Vapor Deposition
• Zn-Related Donor-Acceptor Pair Emission in CuAlSe_2 Epitaxial Layers
• Preparation and Characterization of Cu(Al, Ga)(S, Se)_2 Penternary Alloys
• 2.51 eV Donor-Acceptor Pair Photoluminescence from Zn-Doped CuAlSe_2 Epilayer Grown by Low-Pressure Metalorganic Chemical Vapor Deposition
• Photoreflectance Characterization of CuAlSe_2 Heteroepitaxial Layers Grown by Metalorganic Chemical Vapor Deposition
• Low-Pressure Metalorganic Chemical Vapor Deposition of CuAlSe_2 Epitaxial Films
• Photoreflectance and Photoluminescence Studies of CuAl_xGa_Se_2 Alloys
• Photoreflectance Study of CuAlSe_2 Heteroepitaxial Layers
• Angiotensin II Blockade Restores Albumin Reabsorption in the Proximal Tubules of Diabetic Rats
• Surface Orientation of Cyanobiphenyl Liquid Crystal Monolayer and Pretilt Angle under Various Rubbing Strengths
• Grating Polarizing Beam-Splitter Using Oriented Polydiacetylene Thin Film
• Noncontact Measurement of Sodium Ions in Silicon Oxide
• Characterization of Ferroelectric Property of C-Axis- and Non-C-Axis-Oriented Epitaxially Grown Bi_2VO_ Thin Films : Electrical Properties of Condonsed Matter
• A Novel Non-Destructive Characterization Method of Electronic Properties of Pre- and Post-Processing Silicon Surfaces Based on Ultrahigh-Vacuum Contactless Capacitance-Voltage Measurements
• Noncontact Measurement of Doping Profile for Bare Silicon
• Non-Destructive Characterization of Electronic Properties of Pre- and Post-Processing Silicon Surfaces by UHV Contactless Capacitance-Voltage Method
• Improvement of Sensor for Noncontact Capacitance/Voltage Measurement and Lifetime Measurement of Bare Silicon(100)
• Noncontact Measurement of Generation Lifetime
• Evaluation of GaAs Wafer Using Nomcontact Capacitance/Voltage Measurement
• Investigation of Discharge Phenomena in a Cell of Color Plasma Display Panel I. : One-Dimensional Model and Numerical Method
• High Speed Recording Characteristics of 3-Beam Drive : Drive Technology
• High Speed Recording Characteristics of 3-Beam Drive
• Analysis of Short-Channel Schottky Source/Drain Metal-Oxide-Semiconductor Field-Effect Transistor on Silicon-on-Insulator Substrate and Demonstration of Sub-50-nm n-type Devices with Metal Gate
• Scanning Tunneling Spectroscopy Study of Fe(001) Using Nonmagnetic W- and Fe-Evaporated Probe Tips
• 35 nm Metal Gate p-type Metal Oxide Semiconductor Field-Effect Transistor with PtSi Schottky Source/Drain on Separation by Implanted Oxygen Substrate
• Element-Specific Image and Local Work Function of Fe Submonolayer Film on Au (001) Studied by Scanning Tunneling Microscopy
• Fabrication and Characteristics of a Field Effect Transistor Using CdF_2/CaF_2 Heterostructures on a Si Substrate
• Scanning Tunneling Microscopy Study of Fe Submonolayer Film on Vicinal Au(001)
• Photoresist Chemical Mechanical Polishing for Shallow Trench Isolation
• Photoresist CMP for Shallow Trench Isolation
• Three Dimensional Optical Emission Tomography of an Inductively Coupled Plasma
• Advanced SOI Devices Using CMP and Wafer Bonding
• Robot Assisted Optical Emission Tomography in an Inductively Coupled Plasma Reactor
• Effects of photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography : Lithography Technology
• Effects of Photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography
• High-Speed Magneto-Optic Disk Drive with Overwriting and Read-Verifying Functions : Drive Technology
• High-Speed Magneto-Optic Disk Drive with Overwriting and Read-Verifying Functions
• Use of Tetraethylgermane in ArF Excimer Laser Chemical Vapor Deposition of Amorphous Silicon-Germanium Films
• Low-Pressure Metalorganic Chemical Vapor Deposition of a CuGaSe_2/CuAlSe_2 Heterostructure
• Integration of a Power Supply for System-on-Chip (Special Section on Analog Circuit Techniques for System-on-Chip Integration)
• Charge-State and Isotope Effects on the Recovery Process of Stress-Induced Reorientation of Pt-H_2 Complex in Silicon
• Enhancement of Blue Emission from Mg-Doped GaN Using Remote Plasma Containing Atomic Hydrogen
• Stress-Induced Level Shift of a Hydrogen-Carbon Complex in Silicon : Semiconductors
• Chemical Vapor Deposition of Cu Film on SiO_2 Using Cyclopentadienylcoppertriethylphosphine
• Electrical Properties of Amorphous Semiconductor Ge_xS_
• Contact Charging of a-Se Electrophotographic Photoreceptor with Molten Gallium
• Inhibition of hepatitis C virus replication by chloroquine targeting virus-associated autophagy
• QUANTITATIVE ANALYSIS FOR SHAPE IRREGULARITY OF CERAMIC PARTICLES BASED ON RICHARDSON EFFECT
• A Novel Low-Power Dissipation and High-Speed Converter-Control-IC for the Transmitting Amplifier of Digital Portable Telephones
• Dry Liftoff Method by Sublimation of Molybdenum Oxide
• Thin Film Deposition by Low Energy SiCl^+_n Beam
• Reconditioning-Free Polishing for Interlayer-Dielectric Planarization
• Hot-Carrier Effect of an Ultra-Thin-Film SOI Power MOSFET
• Mitotic Specific Phosphorylation of Serin-1212 in Human DNA Topoisonerase Iiα.
• Mitotic Specific Phosphorylation of Serine-1212 in Human DNA Topoisomerase IIα
• High-Speed SOI Bipolar Transistors Using Bonding and Thinning Techniques
• Silver-enhanced immunogold scanning electron microscopy using vibratome sections of rat kidneys : detection of albumin filtration and reabsorption
• A New SOI-Lateral Bipolar Transistor for High-Speed Operation
• Switching Converter Using Thin-Film Microtransformer with Monolithically Integrated Rectifier Diodes
• Study on Parasitic Bipolar Effect in a 200-V-Class Power MOSFET Using Silicon Direct Bonding SOI Wafer (Special Issue on SOI Devices and Their Process Technologies)
• Application of GFP:Time-Lapse Multi-Wavelength Fluorescence Imaging of Living Mammalian Cells
• Multiple-color Fluorescence Imaging of Chromosomes and Microtubules in Living Cells
• Action of n-Butyl p-Hydroxybenzoate on the Cytoplasmic Membrane of Yeast
• Simultaneous Temperature Measurement of Wafers in Chemical Mechanical Polishing of Silicon Dioxide Layer
• A pH-Controlled Chemical Mechanical Polishing Method for Thin Bonded Silicon-on-Insulator Wafers
• Bond Strength of Bonded SOI Wafers
• Pulse-Field-Assisted Wafer Bonding for Silicon on Insulator
• Solutions of Simultaneous Equations for Oxidation Enhanced and Retarded Diffusions and Oxidation Stacking Fault in Silicon
• Device Simulation of a Thin-Film Silicon on Insulator Power Metal-Oxide-Semiconductor Field-Effect Transistor for Structure Optimization
• Mn2O3 Slurry Reuse by Circulation Achieving High Constant Removal Rate
• Mn2O3 Slurry Achieving Reduction of Slurry Waste
• Si Wafer Bonding with Ta Silicide Formation
• Effect of Buried Oxide Thickness in a Thin-Film Silicon on Insulator Power Metal-Oxide-Semiconductor Field-Effect Transistor

もっと見る 閉じる

スポンサーリンク