Effects of Photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-10-20
著者
-
堀内 敏行
東京電機大学工学部
-
Yoshikawa Akira
Ntt Lsi Laboratories
-
ISHIYAMA Toshihiko
NTT LSI Laboratories
-
Ishiyama Toshihiko
Ntt Integrated Information & Energy Systems Laboratories
-
HORIUCHI Toshiyuki
NTT LSI Laboratories
-
DEGUCHI Kimiyoshi
NTT LSI Laboratories
-
Ishiyama T
Ntt Telecommunications Energy Lab. Tokyo Jpn
-
Deguchi K
Department Of Electronics And Information Systems Osaka University
-
Tokuhisa Hiroaki
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
関連論文
- 青色LEDを用いたナンバリング露光装置に関する検討
- マイクロ引下げ法を用いたMGC材料の開発と形状制御融液成長 (特集 新しい超耐熱材料--MGC材料の開発最前線(下))
- 水熱合成法によるZnO単結晶の作製技術 (特集1 ITO代替材料の最有力!酸化亜鉛の応用製品が未来を切り開く!!)
- 一方向凝固Al_2O_3/YAG/ZrO_2共晶複合材料の組織と高温強度
- ソルボサーマル法によるZnOバルク結晶作製とそのGaN結晶への適用(基板結晶)
- Sc_2O_3置換Al_2O_3/Y_3Al_5O_共晶体の微細組織と結晶方位
- 事例/トピックス タービンなど耐熱構造部材として期待のジオメトリックストラクチャを持つMGC材料 (特集 自動車材料の最新動向--鉄鋼・金属・セラミックス編)
- フラックス法によるLuAlO_3単結晶の常圧下合成および評価
- 不定比ペロブスカイト型化合物ErRh_3B_xの硬さ及び耐酸化性
- 新しい機能性単結晶材料の開発 (特集 機能性単結晶材料--最近話題の材料と技術の進歩)
- 23pA3 Study of ternary equilibrium diagram for crystal growth : the Na_20/Er_O/GeO_2 system
- 23aA5 YAG/sapphire共晶体ファイバーの結晶成長と共晶相の安定成長方位の選択配向性(バルク成長III)
- 不定比ペロブスカイト型化合物YRh_3B_x, YRh_3C_x及びYRh_3B_xC_のB又はC量xの変化に伴う格子定数の変化
- 不定比性プロブスカイト型化合物ScRh_3B_xの硬度と耐酸化性
- Growth of Al_2O_3/Y_3Al_5O_ Eutectic Fiber by Micro-Pulling-Down Method and Its High-Temperature Strength and Thermal Stability
- μ-PD法によるAl_2O_3/YAG共晶ファイバーの細径化と組織制御 : バルク成長III
- Cz法によるGaN用新基板材料Ca_8La_2(PO_4)_6O_2の単結晶作成と格子整合性 : バルク成長II
- 不定比性ペロブスカイト型化合物GdRh_3B_xの硬度と耐酸化性
- レチクル微動多重露光による極微細パタン形成技術の検討
- 光応用・視覚技術の動向と最前線
- 光応用・視覚技術の動向と最前線
- 厚膜レジスト光リソグラフィのマイクロメカニクスへの応用
- Improvement of Coupling-Out Efficiency of Organic Light-Emitting Devices by Dot Array Structures with Organic Layer(Fabrication of Organic Nano-devices)(Recent Progress in Organic Molecular Electronics)
- Orientation Control of High-Density Polyethylene Molecular Chains Using Atomic Force Microscope
- Fabrication of Nanometer-Scale Pattern Using Current-Controlled Scanning Probe Lithography
- Molecular Ferroelectricity of Vinylidene Fluoride Oligomer Investigated by Atomic Force Microscopy
- Structures and Ferroelectric Natures of Epitaxially Grown Vinylidene Fluoride Oligomer Thin Films
- Nanometer-Scale Characterization of Ferroelectric Polymer Thin Films by Variable-Temperature Atomic Force Microscopy
- Structures and Electrical Properties of Fullerene Thin Films on Si(111)-7×7 Surface Investigated by Noncontact Atomic Force Microscopy
- Dynamic Force Microscopy Investigations of C_ Deposited on Si(111) Surface
- Investigation of Surface Potential of Ferroelectric Organic Molecules by Scanning Probe Microscopy
- The Molecular Arrangements of Alkanethiol Self-Assembled Monolayers on Au(111) Studied by Scanning Tunneling Microscopy
- Structures and Local Polarized Domains of Ferroelectric Organic Films Studied by Atomic Force Microscopy
- Structural Study on Self-Assembled Monolayers of Alkanedithiol Molecules
- Characterization of Niobium-Doped Lead Titanate Thin Films
- Electrical Properties of LiNbO_3 Thin Films by RF Magnetron Sputtering and Bias Sputtering
- 青色レーザ走査リソグラフィによる立体形状作成技術の検討
- 光リソグラフィを用いた3次元マイクロ構造体形成技術の研究
- Theoretical Study on Surface Acoustic Wave Characteristics of LiNbO_3 Films on Sapphire Substrates
- In-plane Observations of RF-sputtered LiNbO_3 Thin Films Using an Energy Dispersive Total-Reflection X-Ray Diffractometer
- Simultaneous Analysis of Total Reflection X-Ray Diffraction and Fluorescence from Copper-Phthalocyanine Thin Films during Evaporation Process
- In-Situ X-Ray Observation of Molecular Structure in Organic Thin Films during Evaporation Process by Total Reflection In-Plane X-Ray Diffractometer0
- Non-Equilibrium Thermodynamic Theory of 4-Component Lead-Free Solder
- Liquidus Temperature Design of Lead-Free Solder
- Effect of Ba Addition on the Properties of Bi-Pb-Sr-Ca-Cu-O Superconductors : Electrical Properties of Condensed Matter
- Novel Ultrasonic Soldering Technique for Lead-Free Solders
- 低開口数投影露光リソグラフィを用いた厚膜レジストパタン形成とマイクロ部品製造への応用
- 光リソグラフィによる円柱試料上パタン形成技術の検討
- 小型飛翔ロボット用回転翼の電池駆動特性
- 超軽量角速度センサの小型飛翔ロボット制御への適用性
- マトリックス投影露光技術の検討
- Half Wavelength Pattern Replization Using a Projection Lens with an Ultra High Numerical Aperture and Thin Resist Process
- マトリックス投影露光と金属堆積によるマイクロ部品成形技術の研究
- パタン分割2波長露光による高密度微細パタン形成の基礎検討
- 空中静止小型飛しょう体ロボットの基礎検討
- A New Projection Exposure Method Using a Liquid Crystal Display as a Switching Matrix in Place of a Reticle
- ぼかしフィールド接続スキャン露光によるフィールド接続境界平滑化の検討
- 飛翔体監視ロボットの基礎検討
- 回転翼空中浮揚機構に関する基礎検討
- Effects of photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography : Lithography Technology
- Effects of Photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography
- Liquid Crystalline Oxadiazole with Electron Transporting Capability
- Pyroelectricity of Noncentrosymmetric Langmuir-Blodgett Films of Phenylpyrazine Derivatives
- Scanning Tunneling Microscope Observation of a Polar Liquid Crystal and Its Computer Simulation
- Noncentrosymmetric Langmuir-Blodgett Film of Phenylpyrazine Derivative Applicable to Nonlinear Waveguides
- Optical Image Simulator Using the Real-Space Expression of the Object Pattern and a Differential Operator for Optical Proximity Effect Estimation
- Resolution Enhancement by Oblique Illumination Optical Lithography Using a Transmittance-Adjusted Pupil Filter
- Patterning Characteristics of Oblique Illumination Optical Lithography
- 角速度信号と積分変位信号を併用した小型飛翔跳体ロボットの姿勢制御
- Theoretical Analysis of Photoacoustic Displacement for Inhomogeneous Materials
- A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe : Its Mechanism and Applications to Evaluation of Lattice Damage in Semiconductors
- 回転翼を用いた小型飛翔ロボットへの挑戦
- リソグラフィ先端技術調査専門委員会
- 光リソグラフィ応用技術の研究
- プリント基板上のレジストパタンをめっき雌型とするマイクロ部品製作技術の検討
- 模様編み機の編み針駆動機構の基礎研究
- 同軸反転式ロータを使用した小型飛翔体の浮上に関する基礎研究
- 回転翼飛翔体ロボットへの角速度センサ適用の基礎検討
- 薄膜レジストを用いた高開口数投影露光における解像限界の検討
- マイクロ構造体形成のための大焦点深度投影露光の検討
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering: Electrical Properties
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering : Fabrication and Structure Analyses
- Optical Characteristics of Ultrathin Oligosilane Films Prepared by Molecular Beam Deposition Method
- Effect of Substrate Temperature on Molecular Orientation in Evaporated Thin Films of Vinylidene Fluoride Oligomer
- Enhancement of the Annular Illumination Effect Using a Printing Process Resolvable with Low Image Contrast
- Synthesis of Bi-Sr-Ca-Cu-O High-T_c Phase from a Parent Compound of Ca(Sr)CuO_2
- Pressure Effect on Ferroelectric Phase Transition of Vinylidene Fluoride-Trifluoroethylene Copolymer (54/46 mol%)
- Direct Observation of Domaim Structures in Triglycine Sulfate by Atomic Force Microscope
- Resolution Improvement Using Auxiliary Pattern Groups in Oblique Illumination Lithography
- レーザ走査リソグラフィによる微細管・線材上への螺線パターン形成
- Effects of Electric Field on the Molecular Orientation in Evaporated Ferroelectric Vinylidene Fluoride and Trifluoroethylene Copolymer Films
- マイクロ電気・機械システム用低コストリソグラフィ技術
- Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO_3/Pt/MgO Epitaxial Structure
- Direct Observation of Photoinduced Gratings in LiNbO_3:Fe Single Crystals Using a Scanning Electron Microscope
- Thermal Effects in Properties of Photovoltaic Currents of Pb(Zr, Ti)O_3 Thin Films
- Dielectric and Ferroelectric Hysteresis Loop Measurements for Ultrathin VDF/TrFE Copolymer Films Evaporated Under Electric Field
- Formation of Epitaxial Twins by Perfluoro-N-Alkane Evaporated on Alkali Halide Crystal
- 液晶マトリックス投影露光の厚膜紫外線レジストへの適用
- 光応用・視覚技術の最前線
- Intermediate Structure at the Ferro-to-Paraelectric Phase Transition of VDF/TrFE Copolymer (54/46 mol%)