A New Projection Exposure Method Using a Liquid Crystal Display as a Switching Matrix in Place of a Reticle
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-01-15
著者
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堀内 敏行
東京電機大学工学部
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Horiuchi T
東京電機大
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HORIUCHI Toshiyuki
Tokyo Denki University
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MIYAKAWA Tomoki
Tokyo Denki University
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HOSODA Shinnosuke
Tokyo Denki University
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Miyakawa Tomoki
Tokyo Denki University:(present Address)nikon Corporation Ohi Plant
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Hosoda Shinnosuke
Tokyo Denki University:(present Address)smc Corporation Tsukuba Second Plant
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Tokuhisa Hiroaki
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
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Horiuchi Toshiyuki
Tokyo Denki Univ. Tokyo Jpn
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