光応用・視覚技術の動向と最前線

概要

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The technical committee on light application and visual science (TC-LAV) have been surveying fields of application of optical engineering and visual science; covering medical science, devices for visual information processing, light sources from teraherz wave to extreme ultraviolet, advanced lithography, and etc. This article introduces two topics from recent research activities. The first is an interesting challenge of bio-medical application of light, optically assisted ultrasonic velocity-change imaging applied to monitoring the distribution of gold nano particles for drug delivery system. The second is double patterning processes using the ArF immersion lithography.
2010-01-01