マトリックス投影露光技術の検討
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概要
- 論文の詳細を見る
- 2001-09-21
著者
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堀内 敏行
東京電機大学工学部
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Horiuchi T
東京電機大
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小林 宏史
東京電機大学
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愛知 進太郎
東京電機大学
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堀内 敏行
東京電機大
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Tokuhisa Hiroaki
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
関連論文
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- 光応用・視覚技術の動向と最前線
- 光応用・視覚技術の動向と最前線
- 厚膜レジスト光リソグラフィのマイクロメカニクスへの応用
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- Orientation Control of High-Density Polyethylene Molecular Chains Using Atomic Force Microscope
- Investigations of Nanoparticles by Scanning Near-Field Optical Microscopy Combined with Kelvin Probe Force Microscopy Using a Piezoelectric Cantilever
- Orientation Control of Molecular Chains in Polymers Using Atomic Force Microscopy
- Pyroelectricity of Ferroelectric Vinylidene Fluoride-Oligomer-Evaporated Thin Films
- Nanoscale Investigation of Optical and Electrical Properties by Dynamic-Mode Atomic Force Microscopy Using a Piezoelectric Cantilever
- Nanoscale Electrical Properties of Molecular Films in the Vicinity of Platinum Ultrathin Film Electrode
- Fabrication of Nanogap Electrodes Using Ultrathin Metal Film
- Fabrication of Nanometer-Scale Pattern Using Current-Controlled Scanning Probe Lithography
- Fabrication of a Nanogap on a Metal Nanowire Using Scanning Probe Lithography
- Molecular Ferroelectricity of Vinylidene Fluoride Oligomer Investigated by Atomic Force Microscopy
- Structures and Ferroelectric Natures of Epitaxially Grown Vinylidene Fluoride Oligomer Thin Films
- Nanometer-Scale Characterization of Ferroelectric Polymer Thin Films by Variable-Temperature Atomic Force Microscopy
- Structures and Electrical Properties of Fullerene Thin Films on Si(111)-7×7 Surface Investigated by Noncontact Atomic Force Microscopy
- Dynamic Force Microscopy Investigations of C_ Deposited on Si(111) Surface
- Investigation of Surface Potential of Ferroelectric Organic Molecules by Scanning Probe Microscopy
- The Molecular Arrangements of Alkanethiol Self-Assembled Monolayers on Au(111) Studied by Scanning Tunneling Microscopy
- Structures and Local Polarized Domains of Ferroelectric Organic Films Studied by Atomic Force Microscopy
- Structural Study on Self-Assembled Monolayers of Alkanedithiol Molecules
- Characterization of Niobium-Doped Lead Titanate Thin Films
- Electrical Properties of LiNbO_3 Thin Films by RF Magnetron Sputtering and Bias Sputtering
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- Simultaneous Analysis of Total Reflection X-Ray Diffraction and Fluorescence from Copper-Phthalocyanine Thin Films during Evaporation Process
- In-Situ X-Ray Observation of Molecular Structure in Organic Thin Films during Evaporation Process by Total Reflection In-Plane X-Ray Diffractometer0
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- マトリックス投影露光と金属堆積によるマイクロ部品成形技術の研究
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- A New Projection Exposure Method Using a Liquid Crystal Display as a Switching Matrix in Place of a Reticle
- ぼかしフィールド接続スキャン露光によるフィールド接続境界平滑化の検討
- 飛翔体監視ロボットの基礎検討
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- Effects of photo- and Auger Electron Scattering on Resolution and Linewidth Control in SR Lithography : Lithography Technology
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- Pyroelectricity of Noncentrosymmetric Langmuir-Blodgett Films of Phenylpyrazine Derivatives
- Scanning Tunneling Microscope Observation of a Polar Liquid Crystal and Its Computer Simulation
- Noncentrosymmetric Langmuir-Blodgett Film of Phenylpyrazine Derivative Applicable to Nonlinear Waveguides
- Optical Image Simulator Using the Real-Space Expression of the Object Pattern and a Differential Operator for Optical Proximity Effect Estimation
- Resolution Enhancement by Oblique Illumination Optical Lithography Using a Transmittance-Adjusted Pupil Filter
- Patterning Characteristics of Oblique Illumination Optical Lithography
- 角速度信号と積分変位信号を併用した小型飛翔跳体ロボットの姿勢制御
- Theoretical Analysis of Photoacoustic Displacement for Inhomogeneous Materials
- A New Method of Photothermal Displacement Measurement by Laser Interferometric Probe : Its Mechanism and Applications to Evaluation of Lattice Damage in Semiconductors
- 回転翼を用いた小型飛翔ロボットへの挑戦
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- 模様編み機の編み針駆動機構の基礎研究
- 同軸反転式ロータを使用した小型飛翔体の浮上に関する基礎研究
- 回転翼飛翔体ロボットへの角速度センサ適用の基礎検討
- 薄膜レジストを用いた高開口数投影露光における解像限界の検討
- マイクロ構造体形成のための大焦点深度投影露光の検討
- Highly Oriented Nb-Doped Lead Titanate Thin Films by Reactive Sputtering: Electrical Properties
- Thermally Stimulated Current and Polarization Fatigue in Pb (Zr, Ti) O_3 Thin Films
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- Optical Characteristics of Ultrathin Oligosilane Films Prepared by Molecular Beam Deposition Method
- Effect of Substrate Temperature on Molecular Orientation in Evaporated Thin Films of Vinylidene Fluoride Oligomer
- Enhancement of the Annular Illumination Effect Using a Printing Process Resolvable with Low Image Contrast
- Synthesis of Bi-Sr-Ca-Cu-O High-T_c Phase from a Parent Compound of Ca(Sr)CuO_2
- Pressure Effect on Ferroelectric Phase Transition of Vinylidene Fluoride-Trifluoroethylene Copolymer (54/46 mol%)
- Direct Observation of Domaim Structures in Triglycine Sulfate by Atomic Force Microscope
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- マイクロ電気・機械システム用低コストリソグラフィ技術
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- 液晶マトリックス投影露光の厚膜紫外線レジストへの適用
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- Thick Resist Pattern Replication Using Low Numerical-Aperture Projection Lithography and It's Application to Fabrication of Micro Components