Half Wavelength Pattern Replization Using a Projection Lens with an Ultra High Numerical Aperture and Thin Resist Process
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-01-15
著者
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堀内 敏行
東京電機大学工学部
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Horiuchi T
東京電機大
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HORIUCHI Toshiyuki
Tokyo Denki University
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NARITA Tsuyoshi
Tokyo Denki University
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Tokuhisa Hiroaki
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
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Horiuchi Toshiyuki
Tokyo Denki Univ. Tokyo Jpn
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