Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO_3/Pt/MgO Epitaxial Structure
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概要
- 論文の詳細を見る
In PbTiO_3 (2.2-398 nm in thickness)/Pt/MgO(100) structure, the dependence of the crystalline structure and lattice paramenters of PbTiO_3 thin film on the film thickness was investigated using the θ-2θ XRD method and the energy dispersive typed total reflection X-ray diffraction method (ED-TXRD). By using the ED-TXRD method, we can easily evaluate the in-plane structure of island-structured PbTiO_3 films at the initial growth stage. Although the PbTiO_3 thin films were highly c-axis orientated, the formation of some a-domains was observed with increasing thickness. The lattice parameters of the vertical dimension were dependent on the film thickness, unlike those in-plane. From these experimental results, the inner strain occurring in PbTiO_3 thin films is discussed.
- 社団法人応用物理学会の論文
- 1996-09-30
著者
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堀内 敏行
東京電機大学工学部
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松重 和美
Dep. Of Electronic Sci. And Engineering Kyoto Univ. Katsura Nishikyo Kyoto 615-8510 Japaninnovative
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Shimizu M
Advanced Industrial Science And Technology (aist) Power Electronics Research Center
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Shimizu Mitsuaki
Power Electronics Research Center National Institute Of Advanced Industrial Science And Technology
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Matsushige Kazumi
Department Of Applied Science Faculty Of Engineering Kyushu University
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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Shiosaki Tadashi
Research Development Division Sakai Chemical Industry Co. Ltd.
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Shiosaki Tadashi
Department Of Electrical Engineering Ii Faculty Of Engineering Kyoto University
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Horiuchi Toshihisa
Department Of Applied Physics Faculty Of Engineering Kyushu University
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Tokuhisa Hiroaki
Department Of Materials Science And Technology Graduate School Of Engineering Sciences Kyushu Univer
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Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
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