Helical Patterning onto Fine Pipes and Fabrication of Long Microcoils

概要

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The helical patterning onto fine copper pipes of 80–100 μm diameter was investigated for fabricating microcoil springs, and long microcoils of 5 mm length, 85–100 μm pitch and with a maximum aspect ratio of 60 were obtained when the patterned specimen pipes were wet-etched. The specimen pipes were coated with a positive resist PMER P-AR900 (Tokyo Ohka Kogyo) of 2.5–4 μm thickness, and exposed to a blue laser light beam of 473 nm wavelength. After the pipes were exposed while being scanned using a linear stage and a rotation stage, the patterned pipes were etched in ferric chloride solution maintained at 40–45 °C, and transformed into microcoils. As new methods, the inclination of the pipes was precisely corrected by adjusting the size and the position of beam spot, and the etching time was divided into several steps to improve the uniformity.
2008-06-25