Investigations on the Formation of SiO_2 in Si^+-Implanted Al_2O_3
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-10-01
著者
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Saitoh K
National Industrial Research Institute Of Nagoya
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Nakao Shin-ichi
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory For
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Saitoh Kazuo
National Industrial Research Institute Of Nagoya
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SHIMIZU-IWAYAMA Tsutomu
Department of materials science, Aichi University of Education
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NIIMI Tetsuji
Department of Materials Science, Aichi University of Education
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NAKAO Setsuo
Government Industrial Research Institute Nagoya
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SAITOH KAZUO
Government Industrial Research Institute Nagoya
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Shimizu-iwayama Tsutomu
Department Of Materials Science Aichi University Of Education
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Nakao S
Department Of Electronic Engineering Graduate School Of Engineering Tohoku University:laboratory For
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Niimi Tetsuji
Department Of Materials Science Aichi University Of Education
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NIIMI Tatsuya
Department of Electrical Engineering, Faculty of Engineering, Keio University
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Saitoh Kazuo
Government Industrial Research Institute
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NIIMI Tatsuya
Department of Materials Science, Aichi University of Education
関連論文
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- Investigations on the Formation of SiO_2 in Si^+-Implanted Al_2O_3
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