Ion Beam Induced Damage in Epitaxial TiN Films
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-04-15
著者
-
Saitoh K
National Industrial Research Institute Of Nagoya
-
SAITOH KAZUO
Government Industrial Research Institute Nagoya
-
Padmanabhan Karur
Government Industrial Research Institute
-
MIYAGAWA Yoshiko
Government Industrial Research Institute
-
MIYAGAWA Soji
Government Industrial Research Institute
-
Miyagawa Y
Multifunctional Material Science Department National Industrial Research Institute Of Nagoya
-
Saitoh Kazuo
Government Industrial Research Institute
関連論文
- Silicon Nanoparticle Formation in Si^+ -implanted Thermal Oxide Films and Visible Photoluminescence Behavior
- Investigations on the Formation of SiO_2 in Si^+-Implanted Al_2O_3
- Estimation of Inductance for High-T_c dc-SQUID's in Coplanar Waveguide
- Logic Operation Using a High T_c Coupled Superconducting Quantum Interference Device
- Characterization of Neutron Elastic Recoil Detection Analysis with Low-Energy Neutron Beams
- Annealing of Silica Glasses Implanted with High-Energy Copper Ions
- Effect of High-Energy Carbon Ion Irradiation in Aligned and Random Directions on Microstructure of (111) Au Films
- Damage Production and Reduction of Single-Crystalline TiN Films by 1.8 MeV Carbon Beam Irradiation
- Ion Beam Induced Damage in Epitaxial TiN Films
- Contamination of Evaporated Fluoride Films by 1 MeV Proton Bombardment
- Evaluation of High-Efficiency LiNbO_3 Optical Phase Modulator Using Electrodes Buried in the Buffer Layer
- A Broad-Band Traveling-Wave Ti:LiNbO_3 Optical Phase Modulator
- Evidence of the Modulated Structure in Au-Ni Films
- Contribution of Fructose-1,6-bisphosphatase and Sedoheptulose-1,7-bisphosphatase to the Photosynthetic Rate and Carbon Flow in the Calvin Cycle in Transgenic Plants
- ANALYSIS OF CARBON METABOLISM IN SOURCE AND SINK ORGANS OF TRANSGENIC TOBACCO PLANT HAVING CYANOBACTERIAL FBP/SBPase IN CHLOROPLASTS OR CYTOSOL
- Evaluation of the Defense System in Chloroplasts to Photooxidative Stress Caused by Paraquat Using Transgenic Tobacco Plants Expressing Catalase from Escherichia coli
- ANALYSIS OF PHOTOSYNTHETIC CAPACITY AND CARBON METABOLISM IN TRANSGENIC TOBACCO PLANT HAVING CYANOBACTERIAL FBP/SBPase IN CHLOROPLASTS
- MODULATION OF CARBON METABOLISM IN HIGHER PLANTS WITH IMPROVED CAPACITY IN PHOTOSYNTHESIS BY INTRODUCTION OF CYANOBACTERIAL FBP/SBPase INTO CHLOROPLASTS
- ANALYSIS OF PHOTOSYNTHESIS AND CARBON METABOLISM IN TRANSGENIC TOBACCO PLANT HAVING CYANOBACTERIAL FBP/SBPase IN CHLOROPLASTS
- Measurement and Simulation of Planar Channeling of Protons in CaF_2 and BaF_2
- Surface Oscillations and Statistical Equilibrium of Planar Channeling
- Computer Simulation of Range and Damage Distributions of He ions in SiC
- Implantation Profiles of Low-Energy Helium in Silicon Carbide
- TSEE Responses of Oxides Energetic Ion Bombardment
- Impact-Parameter Dependence of K-Shell Ionization Probabilities for 150 keV Protons on a Titanium Target