Damage Production and Reduction of Single-Crystalline TiN Films by 1.8 MeV Carbon Beam Irradiation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-15
著者
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Saitoh K
National Industrial Research Institute Of Nagoya
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Nakata Hirofumi
Nippon Mining & Metals Co. Ltd. Saitama Jpn
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Niwa H
National Industrial Research Institute Of Nagoya
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NAKAO Setsuo
Government Industrial Research Institute Nagoya
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SAITOH KAZUO
Government Industrial Research Institute Nagoya
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NIWA Hiroaki
National Industrial Research Institute of Nagoya
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NIWA Hiroaki
Government Industrial Research Institute
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IKEYAMA Masami
Government Industrial Research Institute
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MIYAGAWA Yoshiko
Government Industrial Research Institute
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MIYAGAWA Soji
Government Industrial Research Institute
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Nakao S
National Industrial Research Institute Of Nagoya
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Miyagawa Y
Multifunctional Material Science Department National Industrial Research Institute Of Nagoya
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Ikeyama M
Multifunctional Material Science Department National Industrial Research Institute Of Nagoya
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Nakata Hirofumi
Nippon Mining & Metals Co. Ltd.
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Saitoh Kazuo
Government Industrial Research Institute
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