Komano H | Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
スポンサーリンク
概要
関連著者
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Komano H
Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
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Kinoshita H
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Watanabe T
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Watanabe Takeo
Univ. Hyogo Hyogo Jpn
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Watanabe Takayuki
Department of Innovative and Engineered Materials, Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology
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KINOSHITA Hiroo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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WATANABE Takeo
Laboratory of Advanced Science and Technology for Industry, Himeji Institute of Technology
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Akiyama M
Kyushu National Industrial Research Institute Agency Of Industrial Science And Technology Ministry O
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Nishi S
Oki Electric Ind. Co. Ltd. Yokosuka‐shi Jpn
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Nishi Seiji
Research Laboratory Oki Electric Industry Co. Ltd.
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)nhk Science And Technical Researc
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Watanabe T
Department Of Innovative And Engineered Materials Interdisciplinary Graduate School Of Science And E
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Akiyama Masahiro
Research Laboratory Oki Electric Industry Co. Ltd.
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Akiyama Masahiro
Semiconductor Technology Laboratory Oki Electric Industry Co. Ltd.
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Akiyama Masahiro
Research And Development Group Oki Electric Industry Co. Ltd.
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Niibe M
Himeji Inst. Technol. Hyogo Jpn
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Niibe Masahito
Himeji Institute Of Technology Laboratory Of Advanced Science And Technology For Industry
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Niibe Masahito
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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KAMINISHI Katsuzo
Research Laboratory, Oki Electric Industry Co., Ltd.
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KINOSHITA Haruhisa
Research Laboratory, OKI Electric Industry Co., Ltd.
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Kinoshita Haruhisa
Research Institute Of Electronics Shizuoka University
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Kaminishi Katsuzo
Research Laboratory Oki Electric Industry Co. Ltd.
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Kaminishi K
Miyazaki Univ. Miyazaki‐shi Jpn
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NISHI Seiji
Department of Physics, Osaka University
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Niibe Masahito
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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TAKENAKA Hisataka
NTT Interdisciplinary Research Laboratories
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KURIHARA Kenji
NTT LSI Laboratories
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HADA Hideo
New Technology Development Section, Tokyo Ohka Kogyo Co., Ltd.
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Ishida Toshimasa
Research Laboratory Oki Electric Industry Co. Lid
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Kurihara Kazuaki
Plasma Research Center University Of Tsukuba:(present) Japan Atomic Energy Research Institute
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Ishida Takayuki
Department Of Radiology National Federation Of Health Insurance Societies Osaka Chuo Hospital
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Kurihara Kazuaki
Fujitsu Laboratories Inorganic Materials & Polymers Laboratory
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KINOSHITA Hiroo
NTT LSI Laboratories
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Shoki T
Hoya Corp. Tokyo Jpn
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Shoki Tsutomu
Hoya Corporation Ngl Development Center
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Takenaka H
Ntt Advanced Technology Corp.
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Lee Seung
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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SHOKI Tsutomu
HOYA Corporation
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Sakaya Noriyuki
Hoya Corporation Ngl Development Center
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HADA Hideo
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
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KOMANO Hiroshi
Advanced Material Development Division 1, Tokyo Ohka Kogyo Co., Ltd.
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Okazaki Shinji
Association Of Super-advanced Electonics Technologies
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HAMAMOTO Kazuhiro
Department of Materials Science and Engineering, Faculty of Engineering
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HOSOYA Morio
Electronics development Center; HOYA Corporation
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SHOKI Tsutomu
Electronics development Center; HOYA Corporation
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Sano Y
Division Of Precision Science And Technology And Applied Physics Graduate School Of Engineering Osak
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Sano Yoshiaki
Research And Development Group Oki Electric Industry Co. Lid.
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Nii H
Himeji Inst. Technol. Hyogo Jpn
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NII Hajime
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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TANAKA Takeshi
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
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MASHIMA Kiyoto
Optical Designing Headquarters, R&D Dept., Nikon Corporation
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Sakaya Noriyuki
Hoya Corporation Electro-optics Company R&d Center
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Mashima Kiyoto
Optical Designing Headquarters R&d Dept. Nikon Corporation
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Tanaka Takeshi
Laboratory Of Advanced Science &technology For Industry Himeji Institute Of Technology
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Nii Hajime
Laboratory of Advanced Science &Technology for Industry, Himeji Institute of Technology
著作論文
- Novel Evaluation System for Extreme Ultraviolet Lithography Resist in NewSUBARU
- Soft X-Ray Reduction Lithography Using Multilayer Mirrors : X-Ray Lithography
- Soft X-Ray Reduction Lithography Using Multilayer Mirrors
- Contrast Measurement of Reflection Masks Fabricated from Cr and Ta Absorbers for Extreme Ultraviolet Lithography
- Outgassing Analysis in EUV Resist
- Fine Pattern Replication Using ETS-1 Three-Aspherical Mirror Imaging System
- A New Insulated-Gate Inverted-Structure Modulation-Doped AlGaAs/GaAs/N-AlGaAs Field-Effect Transistor
- Persistent Channel Depletion Caused by Hot Electron Trapping Effect in Selectively Doped n-AlGaAs/GaAs Structures
- High-Speed Low-Power Ring Oscillator Using Inverted-Structure Modulation-Doped GaAs/n-AlGaAs Field-Effect Transistors
- Mitigation of Low Outgassing and Small Line Edge Roughness for EUVL Resist
- Resist Outgassing by EUV Irradiation
- Fabrication of Aspherical Mirrors for Extreme Ultra-Violet Lithography (EUVL) Using Deposition Techniques
- A Novel Design of Three-Aspherical-Mirror Imaging Optics for Extreme Ultra-Violet Lithography