KINOSHITA Hiroo | NTT LSI Laboratories
スポンサーリンク
概要
関連著者
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TAKENAKA Hisataka
NTT Interdisciplinary Research Laboratories
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KINOSHITA Hiroo
NTT LSI Laboratories
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Komano H
Tokyo Ohka Kogyo Co. Ltd. Kanagawa Jpn
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KURIHARA Kenji
NTT LSI Laboratories
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Kurihara Kazuaki
Plasma Research Center University Of Tsukuba:(present) Japan Atomic Energy Research Institute
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Kurihara Kazuaki
Fujitsu Laboratories Inorganic Materials & Polymers Laboratory
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Takenaka H
Ntt Advanced Technology Corp.
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Kinoshita H
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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KAWAMURA Tomoaki
NTT Interdisciplinary Research Laboratories
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Ishii Yoshikazu
Ntt Interdisciplinary Research Laboratories
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Haga Tsuneyuki
Ntt Lsi Laboratories
著作論文
- Soft X-Ray Reduction Lithography Using Multilayer Mirrors : X-Ray Lithography
- Soft X-Ray Reduction Lithography Using Multilayer Mirrors
- Evaluation of Large-Area Mo/Si Multilayer Soft X-Ray Mirrors Fabricated by RF Magnetron Sputtering