Control of Roughness in Mo/Al Multilayer Film Fabricated by DC Magnetron Sputtering
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概要
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Multilayer Mo/Al films for soft X-ray optics have been fabricated by a DC magnetron sputtering method. The characteristics of mulfilayer films have been investigated using a transmission electron microscope for observing the cross-sectional microstructure, electron diffraction for determining the crystalline properties, and a small-angle X-ray diffractometer and synchrotron radiation reflectometer for obtaining refractivity. The roughness of the multilayer films was controlled by increasing the number of layers and applying a negative bias to the substrate. While the reflectivity of the reference multilayer film was 23.3% at a normal incidence angle of 5°, it increased to 29.2% as a result of the increase in the number of layers. The surface roughness of the multilayer film decreased and became similar to that of the aluminum monolayer, when the number of layers increased. This was the main reason for the increase in reflectivity. Bias sputtering reduced the roughness of the film and as a result, reflectivity increased to 33.5%, however, at higher bias voltages, probably due to the diffusion of Al or Mo through the interface, reflectivity did not increase any further.
- 2002-08-15
著者
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Sugie Yosohiro
Graduate School Of Engineering Department Of Materials Science And Chemistry University Of Hyogo
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Sugie Yosohiro
Graduate School Of Engineering Himeji Institute Of Technology
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Matsuo Yoshiaki
Graduate School Of Engineering Department Of Materials Science And Chemistry University Of Hyogo
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Matsuo Yoshiaki
Graduate School Of Engineering Himeji Institute Of Technology
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Technology
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Niibe Masato
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Technology
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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NH Hajime
Graduate School of Engineering, Himeji institute of Technology
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MIYAGAWA Makoto
Graduate School of Engineering, Himeji institute of Technology
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Miyagawa Makoto
Graduate School Of Engineering Himeji Institute Of Technology
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Nh Hajime
Graduate School Of Engineering Himeji Institute Of Technology
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Nii Hajime
Graduate School of Engineering, Himeji institute of Technology
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