Sakaya Noriyuki | R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
スポンサーリンク
概要
関連著者
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Kinoshita Hiroo
Laboratory Of Advanced Science And Technology For Industry Himeji Institute Of Technology
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Watanabe Takeo
Laboratory Of Advanced Science And Technology For Industry University Of Hyogo
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Hosoya Morio
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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SHOKI Tsutomu
R&D center, HOYA Corporation
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Nozawa Osamu
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiota Yuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shimojima Shoji
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Kinoshita Hiroo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
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Shiota Yuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shiota Yuki
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hosoya Morio
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hosoya Morio
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Tanaka Kazuumi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Hamamoto Kazuo
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nagarekawa Osamu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 1-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Koto, Kamigori, Ako, Hyogo 678-1205, Japan
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Watanabe Takeo
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, 3-1-2 Kouto, Kamigori, Ako, Hyogo 678-1205, Japan
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Hamamoto Kazuhiro
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Hamamoto Kazuhiro
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shoki Tsutomu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Sakaya Noriyuki
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shimojima Shoji
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Shimojima Shoji
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nozawa Osamu
R&D Center, HOYA Corporation, 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
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Nozawa Osamu
R&D Center, HOYA Corp., 3-3-1 Musashino, Akishima, Tokyo 196-8510, Japan
著作論文
- Evaluating the Optical Index of Ta and Ta-Based Absorbers for an Extreme Ultraviolet Mask Using Extreme Ultraviolet Reflectometry
- Direct Evaluation of Surface Roughness of Substrate and Interfacial Roughness in Molybdenum/Silicon Multilayers Using Extreme Ultraviolet Reflectometer
- Cleaning Characteristics of Contaminated Imaging Optics Using 172 nm Radiation