Maejima Y | Silicon Systems Research Laboratories Nec Corporation
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概要
関連著者
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Maejima Y
Silicon Systems Research Laboratories Nec Corporation
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MAEJIMA Yukihiko
SORTEC Corporation
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Kobayashi Sota
Silicon Systems Research Laboratories Nec Corporation
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YAMASHITA Yoshio
SORTEC Corporation
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TAGUCHI Takao
SORTEC Corporation
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Oizumi H
Hitachi Ltd. Tokyo Jpn
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Oizumi H
Aset Euvl Lab. Kanagawa Jpn
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Oizumi Hiroaki
Sortec Corporation
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Watanabe Teruo
Futaba Corporation
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Atoda Nobufumi
Laboratory For Advanced Optical Technology National Institute Of Advanced Industrial Science And Tec
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Atoda N
Sortec Ibaraki Jpn
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Atoda Nobufumi
Sortec
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Murakami K
静岡大学電子工学研究所
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Watanabe T
Components Development Group Sony Corporation
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Watanabe T
Ritsumeikan Univ. Shiga Jpn
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Watanabe Tetsu
Components Development Group Sony Corporation
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Watanabe T
Tokyo Inst. Technol. Kanagawa Jpn
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Watanabe T
Reserch And Development Division Toto Ltd.
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Kobayashi S
Science University Of Tokyo In Yamaguchi
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Kobayashi S
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology(aist)
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Tatsumi T
Nec Corp. Ibaraki Jpn
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Nagata H
Sumitomo Osaka Cement Co. Ltd. Chiba Jpn
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WATANABE Takeo
SORTEC Corporation
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Yamashita Yohachi
Toshiba Materials & Devices Research Laboratories
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Watanabe T
Tokyo Univ. Agriculture And Technol. Tokyo Jpn
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Watanabe T
Tohoku Univ. Sendai Jpn
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Watanabe Toshihide
Atr Adaptive Communications Research Laboratories:(present Address)science And Technical Research La
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Koike H
Nec Corp. Kanagawa Jpn
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TAGUCHI Takao
ASET Super-fine SR Lithography Laboratory
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Toyoshima Hideo
Silicon Systems Research Laboratories Nec Corporation
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Yamada Jun-ichi
Graduate School Of Engineering Osaka University
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Murakami Kouichi
Institute Of Material Science University Of Tsukuba
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Kobayashi Shunsuke
Science University Of Tokyo
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Kobayashi Shunsuke
Photonics Research Institute National Institute Of Advanced Industrial Science And Technology(aist)
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Yamada Junichi
Silicon Systems Research Laboratories Nec Corporation
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Kobayashi Shunsuke
Liquid Crystal Institute Science University Of Tokyo In Yamaguchi
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TATSUMI Toru
Silicon Systems Research Laboratories, NEC Corporation
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Yamada J
Aichi Institute Of Technology
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Tatsumi Toru
Silicon Systems Research Laboratories Nec Corporation
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Koike H
Kawasaki Heavy Ind. Ltd. Chiba Jpn
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Taguchi T
Department Of Electrical And Electronic Engineering Yamaguchi University
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Hada H
System Devices Research Laboratories Nec Corporation
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Hada Hiromitsu
Nec Corporation Device Platforms Research Laboratories
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Hada Hiromitsu
Silicon Systems Research Laboratories Nec Corporation
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AMANUMA Kazushi
Silicon Systems Research Laboratories, NEC Corporation
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MAEJIMA Yukihiko
Silicon Systems Research Laboratories, NEC Corporation
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MIWA Tohru
Silicon Systems Research Laboratories, NEC Corporation
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KOIKE Hiroki
Silicon Systems Research Laboratories, NEC Corporation
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KUNIO Takemitsu
Silicon Systems Research Laboratories, NEC Corporation
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Miwa Tohru
Silicon Systems Research Laboratories Nec Corporation
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Amanuma K
Silicon Systems Research Laboratories Nec Corporation
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Amanuma Kazushi
Silicon Systems Research Laboratories Nec Corporation
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Kunio T
Silicon Systems Research Laboratories Nec Corporation
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Yamashita Y
Central Research Laboratory Hamamatsu Photonics K.k.
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Ohtani M
Obihiro Univ. Agriculture And Veterinary Medicine Obihiro Jpn
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Maejima Yukihiko
Silicon Systems Research Laboratories Nec Corporation
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Murakami K
Research Institute Of Electronics Shizuoka University
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Kobayashi Shunsuke
Department Of Electronic Engineering (div. Of Engineering Sciences) Faculty Of Technology Tokyo Univ
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AWAJI Naoki
Fujitsu Laboratories Ltd.
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MURAKAMI Katsuhiko
Main Research Laboratory, Nikon Corporation
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NAGATA Hiroshi
Main Research Laboratory, Nikon Corporation
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OHTANI Masayuki
Main Research Laboratory, Nikon, Corporation
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OSHINO Tetsuya
Main Research Laboratory, Nikon, Corporation
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MURAKAMI Katsuhiko
Nikon Corporation
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OHTANI Masayuki
Nikon Corporation
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NAGATA Hiroshi
Nikon Corporation
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Yamashita Y
Power Supply Materials And Devices Laboratory Corporate R&d Center Toshiba Corporation
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Yamashita Yohachi
Corporate R&d Center Toshiba Corporation
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Nagata Hiroshi
Main Research Laboratory Nikon Corporation
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Yamaguchi Yoh-ichi
Hoya Corporation
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Yamashita Yoshio
Sortec Corporation:(present Address) Oki Electric Industry Co. Ltd.
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Nagata H
Sci. Univ. Tokyo Chiba‐ken Jpn
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Awaji Naoki
Sortec Corporation:(present Address)fujitsu Laboratories Ltd.
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Oshino Tetsuya
R&d Headquarters Nikon Corporation
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Oshino Tetsuya
Precision Equipment Company Nikon Corporation
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Kobayashi Shun-ichi
Department Of Physics School Of Science University Of Tokyo
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Oshino Tetsuya
Research Laboratory Nikon Corporation
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Kobayashi Shunichi
Department Of Physics Graduate School Of Science The University Of Tokyo
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MURAKAMI Katsuhiko
Nikon Corp.
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KOBAYASHI Shun-ichi
Faculty of Engineering Science, Osaka University:(Present address)Department of Physics, University of Tokyo
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Kobayashi Shunichi
Department of Physics, Faculty of Science, University of Tokyo
著作論文
- Fabrication of 0.1μm Line-and-Space Patterns using Soft X-Ray Reduction Lithography
- Sub-0.1 μm Resist Patterning in Soft X-Ray (13 nm) Projection Lithography
- Characteristics of 0.25 μm Ferroelectric Nonvolatile Memory with a Pb(Zr, Ti)O_3 Capacitor on a Metal/Via-Stacked Plug
- 0.25μm FeRAM with CMVP (Capacitor-on-Metal/Via-Stacked-Plug) Memory Cell
- Improvement of Dose Uniformity in Large Exposure Field for Synchrotron Radiation Lithography