SAKAKIHARA Masahiko | Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.

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概要

• 同名の論文著者
• Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.の論文著者

関連著者

• Oizumi Hiroaki

  Central Research Laboratory Hitachi Ltd.

• MOCHIJI Kozo

  Central Research Laboratory, Hitachi Ltd.

• KISHIMOTO Akihiko

  Central Research Laboratory, Hitachi, Ltd.

• SAKAKIHARA Masahiko

  Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.

• KAWAI Tetsurou

  Magnetic and Electronic Materials Research Laboratory, Hitachi Metals, Ltd.

• KUNIYOSHI Shinji

  Semiconductor Design and Development Center, Hitachi, Ltd.

• YAMAGUCHI Sadae

  Institute for Materials Research, Tohoku University

• Mochiji K

  Joint Res. Center For Atom Technol. Angstrom Technol. Partnership(jrcat‐atp) Ibaraki Jpn

• Mochiji Kozo

  Central Research Laboratory Hitachi Ltd.

• Kawai Tetsurou

  Magnetic And Electronic Materials Research Laboratory Hitachi Metals Ltd.

• Kishimoto A

  Faculty Of Engineering Hiroshima University

• Yamaguchi Sadae

  Institute For Materials Research Tohoku University

• Kuniyoshi Shinji

  Semiconductor Design And Development Center Hitachi Ltd.

• Sakakihara Masahiko

  Magnetic And Electronic Materials Research Laboratory Hitachi Metals Ltd.

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著作論文

• High-Quality Carbon-Doped Boron Nitride Membrane for X-Ray Lithography Mask

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