Simulation of Limited-Area Cathode as Mask-Irradiation Source
スポンサーリンク
概要
- 論文の詳細を見る
The possibility of using a limited-area thermionic electron cathode as a mask-irradiation electron source was demonstrated by simulation. A mask-irradiation source requires high brightness and good current density uniformity. It was found that both requirements were satisfied at a lower cathode temperature compared to a conventional triode electron gun. Moreover, in order to evaluate the cathode properties in practical use, the emission current uniformity was simulated by taking into account the diameter of a point defect and the shield material’s potential at the surface of the electron cathode. The simulation showed that the effect of the point defect of the source crystal is reduced by thermal velocity of the emitted electrons. In addition, it was found that the shield material’s potential deteriorates the uniformity when the source material evaporates. However, the lower cathode temperature can reduce the evaporation. It is concluded that the limited-area thermionic cathode is suitable for a mask-irradiation electron source.
- 2007-11-15
著者
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Ohta Hiroya
Central Research Laboratory Hitachi Ltd.
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Sohda Yasunari
Central Research Laboratory Hitachi Ltd.
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Tanimoto Sayaka
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Ohta Hiroya
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Sohda Yasunari
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Sohda Yasunari
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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