Ohta Hiroya | Central Research Laboratory Hitachi Ltd.
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概要
関連著者
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Ohta Hiroya
Central Research Laboratory Hitachi Ltd.
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OHTA Hiroya
Central Research Laboratory, Hitachi, Ltd.
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Saitou Norio
Central Research Lab. Hitachi Ltd.
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SAITOU Norio
Central Research Laboratory, Hitachi, Ltd.
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Saitou Norio
Central Reserch Labolatories Hitachi Ltd.
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Sohda Yasunari
Central Research Laboratory Hitachi Ltd.
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Matsuzaka Takashi
Central Research Laboratory Hitachi Ltd.
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Ota H
Pioneer Corp. Saitama Jpn
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KAWASAKI Katsuhiro
Instrument Division, Hitachi, Ltd.
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KOHNO Toshihiko
Musashi Works, Hitachi, Ltd.
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HOGA Morihisa
Musashi Works, Hitachi, Ltd.
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Kawasaki K
Tokyo Inst. Technol. Yokohama Jpn
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Kawasaki Koji
Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Kawasaki Koji
Department Of Preventive And Community Dentistry Osaka Dental University
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Kawasaki Koji
Department Of Electric And Electronic Engineering University Of Tokushima
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Ohta H
Process Engineering Development Dept. Hitachi Ulsi Systems Co. Ltd.
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Saitou N
Central Research Laboratory Hitachi. Ltd.
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Hoga Morihisa
Musashi Works Hitachi Ltd.
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Kohno T
Tokyo Metropolitan Inst. Technol. Tokyo Jpn
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Sohda Yasunari
Central Research Lab., Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Okumura Masahide
Central Research Laboratory Hitachi Ltd
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Tanimoto Sayaka
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Gotoh Yasushi
Central Research Laboratory Hitachi Ltd.
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Yamamoto J
Process Equipment Engineering Div. Canon Sales Co. Inc.
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NAKAMURA Kazumitsu
Instrument Division, Hitachi, Ltd.
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YOSHIMURA Toshiyuki
Central Research Laboratory, Hitachi, Ltd.
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SOHDA Yasunari
Central Research Laboratory, Hitachi, Ltd.
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Sohda Y
Hitachi Ltd. Tokyo Jpn
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Nagata Kouji
Central Research Laboratory Hitachi Ltd.
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UCHINO Shou-ichi
Central Research Laboratory, Hitachi Limited
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YAMAMOTO Jiro
Central Research Laboratory, Hitachi, Ltd.
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TERASAWA Tsuneo
Central Research Laboratory, Hitachi, Ltd.
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OKUMURA Masahide
Central Research Laboratory, Hitachi. Ltd.
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Someda Yasuhiro
Central Research Laboratory Hitachi Ltd.
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Yoshimura T
Kyushu Univ. Fukuoka Jpn
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Yamamoto Jiro
Central Research Laboratory Hitachi Ltd.
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Yoshimura Toshiyuki
Central Research Laboratory Hitachi Ltd.
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Yamamoto J
Central Research Lab. Hitachi Ltd.
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Terasawa Tsuneo
Central Research Laboratory Hitachi Ltd.
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MORIMURA Toshiyuki
Central Research Laboratory, Hitachi Ltd.
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Ohta H
Central Research Laboratory Hitachi. Ltd.
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Uchino S
Central Research Lab. Hitachi Ltd.
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Okumura Masahide
Central Research Laboratory Hitachi Ltd.
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Yoshimura T
Osaka Univ. Osaka Jpn
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Uchino S
Hitachi Ltd. Tokyo Jpn
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Uchino Shou-ichi
Central Research Laboratory Hitachi Limited
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Morimura Toshiyuki
Central Research Laboratory Hitachi Ltd.
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Nakamura Kazumitsu
Instrument Division Hitachi Ltd.
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Uchino Shou-ichi
Central Research Lab., Hitachi Ltd.
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Tanimoto Sayaka
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan
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Ohta Hiroya
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Ohta Hiroya
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Ohta Hiroya
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan
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Sakakibara Makoto
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Kanosue Tadashi
Hitachi High-Tech Fielding Co., Shinjuku, Tokyo 160-0004, Japan
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Ban Naoma
Hitachi-HITEC Co., Hitachinaka, Ibaraki 312-8504, Japan
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Okumura Masahide
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan
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Sohda Yasunari
Central Research Laboratory, Hitachi, Ltd., Kokubunji, Tokyo 185-8601, Japan
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Sohda Yasunari
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Someda Yasuhiro
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji-shi, Tokyo 185-8601, Japan
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Yamamoto Jiro
Central Research Lab., Hitachi Ltd.
著作論文
- Stitching Error Analysis in an Electron Beam Lithography System: Column Vibration Effect
- The Requirements for Future Elcetron-Beam Reticle Fabrication Systems from an Error Analysis Viewpoint
- Error Analysis in Electron Beam Lithography System : Thermal Effects on Positioning Accuracy
- Nanofabrication with a Novel EB System with a Large and Stable Beam Current
- Design and Evaluation of an Electron Objective Lens System with Two Lenses and Two Defiectors
- Active Vibration Correction in Electron Beam Lithography System
- Simulation of Limited-Area Cathode as Mask-Irradiation Source
- Measurements of Variable-Shaped Electron Beams with Solid-State Detector and Scattering Aperture
- Preparatory Study for the Matrix-Pattern Imaging, EB System