Iijima Shimpei | Central Research Laboratory Hitachi Ltd.
スポンサーリンク
概要
関連著者
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Iijima Shimpei
Central Research Laboratory Hitachi Ltd.
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Iijima S
Fundamental Research Laboratories Nec Corporation
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Iijima Sumio
Fundamental Research Laboratories Nec Corporation
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Irie T
Kyoto Univ. Kyoto Jpn
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IRIE Takashi
Central Research Laboratory, Hitachi Ltd.
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Mitsui Y
Semiconductor & Integrated Circuits Division Hitachi Ltd.
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KURIYAMA Katsumi
Sales and Marketing Division, Hitachi Tokyo Electronics Co., Ltd.
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Kuriyama Katsumi
Sales And Marketing Division Hitachi Tokyo Electronics Co. Ltd.
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Mizokami Kazuaki
Precision Center Hitachi Tokyo Electronics Co. Ltd.
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MITSUI Yasuhiro
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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Hasumi K
Tokyo Noko Univ. Tokyo Jpn
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Yano F
Semiconductor & Integrated Circuits Division Hitachi Limited
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Yano Fumiko
Central Research Laboratory Hitachi Limited
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MUTO Akiko
Central Research Laboratory, Hitachi Ltd
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Muto Akiko
Central Research Laboratory Hitachi Ltd.
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SUGAWARA Yasuhiro
Central Research Laboratory, Hitachi Ltd.
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IIJIMA Shimpei
Central Research Laboratory, Hitachi Ltd.
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Muto Akiko
Central Research Laboratory Hitachi Ltd
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MITSUI Yasuhiro
Central Research Laboratory, Hitachi Ltd.
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MIZOKAMI Kazuaki
EED, Hitachi Tokyo Electronics Co., Ltd.
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HASUMI Keiji
EED, Hitachi Tokyo Electronics Co., Ltd.
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KURIYAMA Katsumi
EED, Hitachi Tokyo Electronics Co., Ltd.
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MIZOKAMI Kazuaki
Precision Center, Hitachi Tokyo Electronics Co., Ltd.
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Sugawara Yasuhiro
Central Research Laboratory Hitachi Ltd.
著作論文
- The Study of Ultrathin Tantalum Oxide Films before and after Annealing with X-Ray Photoelectron Spectroscopy
- Quantitative Analysis of Trace Water in Monosilane Gas Using Atmospheric-Pressure Ionization Mass Spectrometer with Bicompartment Ion Source
- A New Atmospheric Pressure Ionization Mass Spectrometer for the Analysis of Trace Gas Impurities in Silicon Source Gases used for Semiconductor Fabrication