MITSUI Yasuhiro | Central Research Laboratory, Hitachi Ltd.

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概要

• 同名の論文著者
• Central Research Laboratory, Hitachi Ltd.の論文著者

関連著者

• Irie T

  Kyoto Univ. Kyoto Jpn

• MITSUI Yasuhiro

  Central Research Laboratory, Hitachi Ltd.

• IRIE Takashi

  Central Research Laboratory, Hitachi Ltd.

• Mitsui Y

  Semiconductor & Integrated Circuits Division Hitachi Ltd.

• Iijima S

  Fundamental Research Laboratories Nec Corporation

• Iijima Sumio

  Fundamental Research Laboratories Nec Corporation

• Hasumi K

  Tokyo Noko Univ. Tokyo Jpn

• Saiki A

  Tokyo Inst. Technol. Tokyo Jpn

• Okuhira H

  Central Research Laboratory Hitachi Ltd.

• Okuhira Hidekazu

  Central Research Laboratory Hitachi Ltd.

• Iijima Shimpei

  Central Research Laboratory Hitachi Ltd.

• SAIKI Atsushi

  Industrial Environment Control Facilities Division, Hitachi Plant Engineering & Construction Co., Lt

• MIZOKAMI Kazuaki

  Precision Center, Hitachi Tokyo Electronics Co., Ltd.

• KURIYAMA Katsumi

  Sales and Marketing Division, Hitachi Tokyo Electronics Co., Ltd.

• HASUMI Keiji

  Precision Center, Hitachi Tokyo Electronics Co., Ltd.

• Kuriyama Katsumi

  Sales And Marketing Division Hitachi Tokyo Electronics Co. Ltd.

• Mizokami Kazuaki

  Precision Center Hitachi Tokyo Electronics Co. Ltd.

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著作論文

• A New Atmospheric Pressure Ionization Mass Spectrometer for the Analysis of Trace Gas Impurities in Silicon Source Gases used for Semiconductor Fabrication
• Quantitative Analysis of Trace Hydrogen in Highly Purified Nitrogen Gas Using Rapid Reactions in Atmospheric Pressure Ionization Mass Spectrometer
• A Drift Tube for Monitoring ppb Trace Water

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