Influence of Lattice Distortion and Oxygen Defects in BST Films for Memory Capacitors
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概要
- 論文の詳細を見る
- 2000-08-28
著者
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阿部 和秀
(株)東芝 研究開発センター
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Hieda Katsuhiko
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Aoyama T
Toshiba Corp. Yokohama Jpn
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Aoyama T
Hitachi Ltc. Ibaraki Jpn
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ABE Kazuhide
Corporate R&D Center, Toshiba Corporation
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FUKUSHIMA Noburu
Corporate R&D Center, Toshiba Corporation
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Aoyama Tomonori
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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NIWA Shoko
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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KIYOTOSHI Masahiro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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YAMAZAKI Souichi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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IZUHA Mitsuaki
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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EGUCHI Kazuhiro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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ARIKADO Tunetoshi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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Niwa Shoko
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Arikado T
Semiconductor Leading Edge Technologies Inc.
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阿部 和秀
東芝・総合研究所
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Izuha Mitsuaki
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Yamazaki S
Toshiba Corp. Yokohama Jpn
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Eguchi K
Tokyo Metropolitan Univ. Tokyo Jpn
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Abe Kazuhide
Corporate R&d Center Toshiba Corporation
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Abe Kazuhide
Material And Devices Research Laboratories R&d Center Toshiba Corporation
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Abe Kazuhide
Metals And Ceramics Laboratory Toshiba R&amo;d Center Toshiba Corporation
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Abe Kazuhide
Research And Development Center Toshiba Corporation
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Abe Kazuhide
Materials And Devices Research Laboratories R&d Center Toshiba Corporation
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阿部 和秀
(株)東芝研究開発センター Lsi基盤技術ラボラトリー
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阿部 和秀
(株)東芝
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Kiyotoshi Masahiro
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Fukushima N
Corporate Research & Development Center Toshiba Corporation
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Arikado Tunetoshi
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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