Plasma-Damage-Free Gate Process Using Chemical Mechanical Polishing for 0.1 μm MOSFETs
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-04-30
著者
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Hieda Katsuhiko
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Saito Tomohiro
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.
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Inumiya Seiji
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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NAKAJIMA Kazuaki
Microelectronics Engineering Labs., Toshiba Corporation
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OZAWA Yoshio
Microelectronics Engineering Laboratory, Toshiba Corp.
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YAGISHITA Atsushi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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SAITO Tomohiro
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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SUGURO Kyoichi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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ARIKADO Tsunetoshi
Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation
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AKASAKA Yasushi
Microelectronics Engineering Laboratory, Toshiba Corp.
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YANO Hiroyuki
Microelectronics Engineering Laboratory, Toshiba Corporation
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OKUMURA Katsuya
Microelectronics Engineering Laboratory, Toshiba Corporation
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Nakajima Kensuke
Research Institute Of Electrical Communication Tohoku University
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Saito T
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.
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Arikado T
Semiconductor Leading Edge Technologies Inc.
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Ozawa Yoshio
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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Yano H
Process And Manufacturing Engineering Center Toshiba Corporation Semiconductor Company
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Suguro K
Toshiba Corporation Semiconductor Company
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Okumura Katsuya
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.:(present)university
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Yagishita A
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Akasaka Yasushi
Microelectronics Engineering Laboratory Toshiba Corporation
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Nakajima Kazuaki
Microelectronics Engineering Labs. Toshiba Corporation
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Saito T
School Of Engineering Nagoya University
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Suguro Kyoichi
Toshiba Corporation Semiconductor Company
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Arikado Tunetoshi
Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation
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