Sub 1.3nm Amorphous Ta_2O_5 Gate Dielectrics for Damascene Metal Gate Transistor

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概要

• 論文の詳細を見る
• 1999-09-20

著者

• Saito Tomohiro

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.

• Inumiya Seiji

  Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation

• TSUNASHIMA Yoshitaka

  Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation

• OZAWA Yoshio

  Microelectronics Engineering Laboratory, Toshiba Corp.

• YAGISHITA Atsushi

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• SAITO Tomohiro

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• HOTTA Masaki

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• SUGURO Kyoichi

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• TSUNASHIMA Yoshitaka

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• ARIKADO Tsunetoshi

  Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation

• Saito T

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.

• Tsunashima Y

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation

• Tsunashima Yoshitaka

  Microelectronics Engineering Laboratory Toshiba Corp.

• Arikado T

  Semiconductor Leading Edge Technologies Inc.

• Hotta Masaki

  Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation

• Ozawa Yoshio

  Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation

• Suguro K

  Toshiba Corporation Semiconductor Company

• Yagishita A

  Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation

• Saito T

  School Of Engineering Nagoya University

• Suguro Kyoichi

  Toshiba Corporation Semiconductor Company

• Arikado Tunetoshi

  Microelectronics Engineering Laboratory Semiconductor Company Toshiba Corporation

関連論文

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