Novel Elevated Source/Drain Technology for FinFET Overcoming Agglomeration and Facet Problems Utilizing Solid Phase Epitaxy
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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Miyano K
Toshiba Corp. Yokohama Jpn
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MIZUSHIMA Ichiro
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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MIYANO Kiyotaka
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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TSUNASHIMA Yoshitaka
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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Kaneko Akio
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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YAGISHITA Atsushi
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp.
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SUGURO Kyoichi
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp.
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Mizushima I
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Mizushima Ichiro
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Tsunashima Y
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Tsunashima Yoshitaka
Process & Manufacturing Center Semiconductor Company Toshiba Corporation
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Suguro K
Toshiba Corporation Semiconductor Company
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Suguro Kyoichi
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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EGUCHI Kazuhiro
Process & Manufacturing Center, Semiconductor Company, Toshiba Corporation
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Yagishita A
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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SAITO Yoshihiko
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corporation
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Miyano Kiyotaka
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Eguchi Kazuhiro
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Saito Yoshihiko
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Suguro Kyoichi
Toshiba Corporation Semiconductor Company
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MIZUSHIMA Ichiro
Process & Manufactruing Engineering Center, Semiconductor Company, Toshiba Corporation
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TSUNASHIMA Yoshitaka
Process & Manufactruing Engineering Center, Semiconductor Company, Toshiba Corporation
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