Ultrashallow Junction Formation for Sub-100nm Complementary Metal-Oxide-Semiconductor Field-Effect Transistor by Controlling Transient Enhanced Diffusion
スポンサーリンク
概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 2001-04-01
著者
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MURAKOSHI Atsushi
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp.
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SUGURO Kyoichi
Process and Manufacturing Engineering Center, Semiconductor Company, Toshiba Corp.
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Toyoshima Yasutake
Electrotechnical Labotatory
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Toyoshima Yoshiaki
System Lsi Research & Development Center Toshiba Corporation Semiconductor Company
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Toyoshima Yoshiaki
Semiconductor Device Engineering Laboratory Toshiba Corporation
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OHUCHI Kazuya
System LSI Research & Development Center, Toshiba Corporation Semiconductor Company
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ADACHI Kanna
System LSI Research & Development Center, Toshiba Corporation Semiconductor Company
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HOKAZONO Akira
System LSI Research & Development Center, Toshiba Corporation Semiconductor Company
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KANEMURA Takahisa
System LSI Research & Development Center, Toshiba Corporation Semiconductor Company
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AOKI Nobutoshi
System LSI Research & Development Center, Toshiba Corporation Semiconductor Company
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NISHIGOHRI Masahito
Advanced Logic Technology Department, Toshiba Corporation Semiconductor Company
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Adachi Kanna
System Lsi Research & Development Center Toshiba Corporation Semiconductor Company
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Ouchi Kiyoshi
Central Research Laboratory Hitachi Ltd.
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Aoki Nobutoshi
System Lsi Research & Development Center Toshiba Corporation Semiconductor Company
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Hokazono Akira
System Lsi Research & Development Center Toshiba Corporation Semiconductor Company
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Suguro K
Toshiba Corporation Semiconductor Company
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Suguro Kyoichi
Process & Manufacturing Engineering Center Semiconductor Company Toshiba Corporation
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Nishigohri Masahito
Advanced Logic Technology Department Toshiba Corporation Semiconductor Company
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Murakoshi A
Toshiba Corp. Yokohama Jpn
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Murakoshi Atsushi
Process And Manufacturing Engineering Center Semiconductor Company Toshiba Corp.
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Suguro Kyoichi
Toshiba Corporation Semiconductor Company
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Murakoshi Atsushi
Process & Manufacturing Engineering Center, Toshiba Corporation Semiconductor Company
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