High Performance InP/InGaAs HBTs for 40-Gb/s Optical Transmission ICs (Special Issue on Ultra-High-Speed IC and LSI Technology)

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概要

• 論文の詳細を見る

• We have developed a fabrication technique for high-performance high-thermal-stability InP/InGaAs heterojunction bipolar transistors (HBTs) for use in 40-Gb/s ICs. The HBT's T-shaped emitter electrode structure simplifies the fabrication process and enables high controllability of spacing between the emitter and the base electrodes. A highly-C-doped base, grown by gas-source MBE, and a new Pt-based metal system results in a low base resistance. An InP subcollector suppresses thermal runaway of HBTs at high collector current better than a conventional InGaAs subcollector does. Using these techniques, we fabricated a very-high-performance HBT with an extremely high cutoff frequency f_T of 235GHz. The RF measurements show that the collector current at the peak cutoff frequency is inversely proportional to collector thickness. We also fabricated a static 1/2 frequency divider, that can be used for 40-Gb/s optical transmission systems, operating up to 44 GHz. This divider confirmed that the developed HBT is applicable to 40-Gb/s optical transmission ICs.

• 社団法人電子情報通信学会の論文
• 1999-03-25

著者

• OUCHI Kiyoshi

  Central Research Laboratory, Hitachi, Ltd.

• MASUDA Hiroshi

  Toei Kogyo Ltd.

• Oka Tohru

  Central Research Laboratory Hitachi Ltd.

• Ouchi Kiyoshi

  Central Research Laboratory Hitachi Ltd.

• MASUDA Hiroshi

  Central Research Laboratory, Hitachi, Ltd.

• TERANO Akihisa

  Central Research Laboratory, Hitachi, Ltd.

• SUZUKI Hideyuki

  Central Research Laboratory, Hitachi, Ltd.

• WATANABE Koichi

  Central Research Laboratory, Hitachi, Ltd.

• MATSUBARA Hirokazu

  Central Research Laboratory, Hitachi, Ltd.

• TANOUE Tomonori

  Central Research Laboratory, Hitachi, Ltd.

• Terano Akihisa

  Central Research Laboratory Hitachi Ltd.

• Tanoue T

  Central Research Laboratory Hitachi Ltd.

• Tanoue Tomonori

  Central Research Laboratory Hitachi Ltd.

• Masuda H

  Toei Kogyo Ltd.

• Suzuki Hideyuki

  Central Research Laboratory Hitachi Ltd.

• Watanabe Koichi

  Central Research Laboratory Hitachi Ltd.

• Masuda Hiroshi

  Central Research Laboratory Hitachi Ltd.

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