Non-contact Deformable Mirror Actuator for Spherical Aberration Compensation
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概要
- 論文の詳細を見る
We have proposed and demonstrated a novel non-contact electromagnetic deformable mirror actuator for spherical aberration compensation with simple configurations. The magnetic ring with low stiffness placed on a mirror deformed the mirror into an ideal parabolic shape by applying a magnetic force generated from an electromagnet underneath. We were able to control the deformation of the mirror by adjusting the applied voltage. The maximum deviation from ideal shape was less than 30 nm. In addition, a continuous change of the defocus aberration proportional to the 1.5-$\lambda_{\text{RMS}}$/μm deformation of the mirror was achieved.
- 2011-09-25
著者
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Hashizume Jiro
Mechanical Engineering Research Laboratory Hitachi Ltd
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Kanamaru Masatoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Watanabe Koichi
Central Research Laboratory Hitachi Ltd.
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Kanamaru Masatoshi
Mechanical Engineering Research Laboratory, Hitachi, Ltd., Hitachinaka, Ibaraki 312-0034, Japan
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Ide Tatsuro
Central Research Laboratory, Hitachi, Ltd., Kokubunnji, Tokyo 185-8601, Japan
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Mukoh Masaki
Central Research Laboratory, Hitachi, Ltd., Kokubunnji, Tokyo 185-8601, Japan
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Yamauchi Yoshiaki
Mechanical Engineering Research Laboratory, Hitachi, Ltd., Hitachinaka, Ibaraki 312-0034, Japan
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Ide Tatsuro
Central Research Laboratory, Hitachi, Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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Mukoh Masaki
Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-Koigakubo, Kokubunji, Tokyo 185-8601, Japan
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