P-MCH-01 Low-Insertion-Loss 8×8 Optical Matrix Switch using MEMS Analog-Control Mirror(Micro/Nanomechatronics,Technical Program of Poster Session)
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概要
- 論文の詳細を見る
An optical matrix switch with low- insertion-loss, a flat package and flexible configuration of 18 input/output ports was developed. An array of two-axis electrostatic movable mirrors fabricated by MEMS technology was used to switch optical paths. The mean of measured insertion losses of all 64 paths in an 8×8 switch configuration was 1.1 dB; thus low insertion loss of the switch was confirmed. Loss increase caused by tilt angle drift of the mirrors was reduced to 1.1 dB by applying bias voltage.
- 一般社団法人日本機械学会の論文
- 2009-06-17
著者
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Fukuda Kazuyuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Iizuka Akiko
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Harada Takeshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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KAZAMA Atsushi
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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ITOU Yasuhiro
Information System Components Company, Hitachi Metals, Ltd.
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HORINO Masaya
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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KANAMARU Masatoshi
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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OKADA Ryoji
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Okada Ryoji
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Itou Yasuhiro
Information System Components Company Hitachi Metals Ltd.
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Horino Masaya
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Horino Masaya
Mechanical Engineering Research Lab. Hitachi Ltd.
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Kazama Atsushi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Kanamaru Masatoshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
関連論文
- Non-contact Deformable Mirror Actuator for Spherical Aberration Compensation
- P-MCH-01 Low-Insertion-Loss 8×8 Optical Matrix Switch using MEMS Analog-Control Mirror(Micro/Nanomechatronics,Technical Program of Poster Session)
- Low-Insertion-Loss Optical Matrix Switch Using MEMS Micromirrors Assembled by Passive Alignment(Micro Mechanical Engineering)
- A14-092 LOW-INSERTION-LOSS OPTICAL MATRIX SWITCH USING MEMS MICROMIRRORS ASSEMBLED BY PASSIVE ALIGNMENT
- Development of Prototype Micromechanical Optical Switch