Low-Insertion-Loss Optical Matrix Switch Using MEMS Micromirrors Assembled by Passive Alignment(<Special Issue>Micro Mechanical Engineering)

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概要

• 論文の詳細を見る

• A three-dimensional (3D)-type MEMS optical switch with low insertion loss and low assembly cost has been developed. The switch consists of two optical beam scanners placed facing each other. Each scanner consists of a collimator array and two mirror arrays. The scanner controls the direction of each optical beam by means of two single-axis mirrors. The mirror arrays are fabricated by MEMS technology and contain holes through which the beam traverses in each mirror array. The mirror arrays are stacked directly on the collimator array, which is passively aligned using pins and alignment holes. Based on this structure, a prototype 32-port (with three extra ports) optical switch was developed. Measured insertion loss of six arbitrary paths in the switch is in the range of 1.5-1.9dB. It is thus concluded that a 3D-type optical switch assembled by wholly passive alignment with lower insertion loss than 2dB is feasible.

• 一般社団法人日本機械学会の論文
• 2004-08-15

著者

• Fukuda Kazuyuki

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Ishikawa Tadaharu

  Department Of Environmental Science And Engineering Tokyo Institute Of Technology

• Harada Takeshi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• KAZAMA Atsushi

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• ITOU Yasuhiro

  Information System Components Company, Hitachi Metals, Ltd.

• HORINO Masaya

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• KANAMARU Masatoshi

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• OKADA Ryoji

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• ITOU Yasuhiro

  Advanced Electronics Research Laboratory, Hitachi Metals, Ltd.

• AKASHI Teruhisa

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• ISHIKAWA Tadaaki

  Advanced Research Laboratory, Hitach, Ltd.

• HARADA Takeshi

  Advanced Research Laboratory, Hitachi, Ltd.

• OKADA Ryoji

  Research and Development Group, Hitachi, Ltd.

• Okada Ryoji

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Itou Yasuhiro

  Information System Components Company Hitachi Metals Ltd.

• Horino Masaya

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Horino Masaya

  Mechanical Engineering Research Lab. Hitachi Ltd.

• Kazama Atsushi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Akashi Teruhisa

  Mechanical Engineering Research Lab. Hitachi Ltd.

• Kanamaru Masatoshi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Ishikawa Tadaaki

  Advanced Research Laboratory Hitach Ltd.

関連論文

• Non-contact Deformable Mirror Actuator for Spherical Aberration Compensation
• P-MCH-01 Low-Insertion-Loss 8×8 Optical Matrix Switch using MEMS Analog-Control Mirror(Micro/Nanomechatronics,Technical Program of Poster Session)
• Low-Insertion-Loss Optical Matrix Switch Using MEMS Micromirrors Assembled by Passive Alignment(Micro Mechanical Engineering)
• A14-092 LOW-INSERTION-LOSS OPTICAL MATRIX SWITCH USING MEMS MICROMIRRORS ASSEMBLED BY PASSIVE ALIGNMENT
• Development of Prototype Micromechanical Optical Switch
• Development of CIP-Reversed Weighted Residual Method for Water Flow with Free Water Surface and Arbitrary Topography : Algorithmic Improvements and Applications(CIP)
• Fabrication of a Tantalum-Nitride Thin-Film Resistor with a Low-Variability Resistance

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