New Finding of Pt Segregation at the NiSi/Si Interface by Atom Probe
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概要
- 論文の詳細を見る
- 2007-09-19
著者
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Suguro K
Toshiba Corporation Semiconductor Company
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SUGURO Kyoichi
Toshiba Corporation
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Akutsu Haruko
Toshiba Corporation Semiconductor Company
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Iinuma Toshihiko
Toshiba Corporation Semiconductor Company
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UCHIDA Hiroshi
Toshiba Nanoanalysis Corporation
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NAKAMURA Kazuhiko
TOSHIBA Corporation Semiconductor Company
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Suguro Kyoichi
Toshiba Corporation Semiconductor Company
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