Effects of Ambient Gas on Dielectric Constant of Sputtered SrTiO_3 Epitaxial Thin Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-10-15
著者
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KOMATSU Shuichi
Materials and Devices Research Labs., R&D Center, Toshiba Corporation
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ABE Kazuhide
Materials and Devices Research Labs., R&D Center, Toshiba Corporation
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FUKUSHIMA Noburu
Materials and Devices Research Labs., R&D Center, Toshiba Corporation
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Komatsu S
Waseda Univ. Tokyo Jpn
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Abe Kazuhide
Corporate R&d Center Toshiba Corporation
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Abe Kazuhide
Material And Devices Research Laboratories R&d Center Toshiba Corporation
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Komatsu Shuichi
Materials And Devices Laboratory R & D Center Toshiba Corporation
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Fukushima N
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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Fukushima N
Corporate Research & Development Center Toshiba Corporation
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