Misawa Yutaka | Hitachi Research Laboratory Hitachi Lid.
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概要
関連著者
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Misawa Yutaka
Hitachi Research Laboratory Hitachi Lid.
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Misawa Yutaka
Hitachi Research Laboratory Hitachi Ltd.
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YAGI Hideyuki
Hitachi Research Laboratory, Hitachi Lid.
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Yagi Hideyuki
Hitachi Research Laboratory Hitachi Lid.
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Koike Yoshihiko
Hitachi Research Laboratory Hitachi Ltd.
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Suzuki Takaya
Hitachi Limited Hitachi Research Laboratory
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Yagi Hideyuki
Hitachi Research Laboratory Hitachi Ltd.
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Aoyama Takashi
Hitachi Research Laboratory Hitachi Ltd
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Suzuki Masayuki
Semiconductor And Integrated Circuit Division Hitachi Ltd.
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SUZUKI Masayuki
Semiconductor and Integrated Circuits Division, Hitachi, Ltd.
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MISAWA Yutaka
Hitachi Research Laboratory, Hitachi, Ltd.
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AOYAMA Takashi
Hitachi Research Laboratory, Hitachi, Ltd.
著作論文
- Electrical Conduction of Silicon Nitride Films Deposited by SiH_4-NH_3 Reaction
- Electrical and Mechanical Properties of Silicon Nitride Films Deposited by the SiCl_4-NH_3 Reaction
- Cracks in Silicon Dioxide-Phosphosilicate Glass-Silicon Nitride Composite Layer on Silicon Substrates
- Dislocations and Tungsten Concerntration Profiles in Tungsten-Silicon Contact Areas