YAGI Hideyuki | Hitachi Research Laboratory, Hitachi Lid.
スポンサーリンク
概要
関連著者
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Misawa Yutaka
Hitachi Research Laboratory Hitachi Ltd.
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Misawa Yutaka
Hitachi Research Laboratory Hitachi Lid.
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YAGI Hideyuki
Hitachi Research Laboratory, Hitachi Lid.
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Yagi Hideyuki
Hitachi Research Laboratory Hitachi Lid.
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Yagi Hideyuki
Hitachi Research Laboratory Hitachi Ltd.
著作論文
- Electrical Conduction of Silicon Nitride Films Deposited by SiH_4-NH_3 Reaction
- Electrical and Mechanical Properties of Silicon Nitride Films Deposited by the SiCl_4-NH_3 Reaction
- Cracks in Silicon Dioxide-Phosphosilicate Glass-Silicon Nitride Composite Layer on Silicon Substrates