Sputter Deposition of YBa_2Cu_3O_<7-x> Thin Films with Low Gas Pressure
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-01-20
著者
-
Suzuki T
Free Electron Laser Research Institute Inc.
-
Suzuki T
Nhk (japan Broadcasting Corp.) Tokyo
-
Tsuda K
Univ. Tokyo Tokyo
-
SUZUKI Takeshi
Fuji Electric Corporate Research and Development, Ltd.
-
TSUDA Koichi
Fuji Electric Corporate Research and Development, Ltd.
-
NAGANO Megumi
Fuji Electric Corporate Research and Development, Ltd.
-
MUKAE Kazuo
Fuji Electric Corporate Research and Development, Ltd.
-
MUROI Michihito
Fuji Electric Corporate Research and Development Ltd.
-
OKAMURA Yuko
Fuji Electric Corporate Research and Development Ltd.
-
Suzuki Tatsuro
Department Of Electrical Engineering Shizuoka University
-
Tsuda Koichi
Fuji Electric Corporate Research And Development Ltd.
-
Tsuda K
Nec Corp. Ibaraki Jpn
-
Nagano M
Department Of Public Health Kumamoto University School Of Medicine
-
Nagano Megumi
Fuji Electric Advanced Technology Co. Ltd.
-
Mukae Kazuo
Fuji Electric Corporate Research And Development Ltd.
-
Mukae Kazuo
Fuji Electric Corp. R & D Ltd.
-
Suzuki T
Tdk Corp. Chiba Jpn
関連論文
- 22pHS-7 収束電子回折法によるBiFeO_3強誘電薄膜の歪み分布解析(22pHS 誘電体・フォノン(構造解析・フォノン),領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 23aGA-9 収束電子回折法によるNdBaMn_2O_6室温相および低温相の結晶構造解析(23aGA マンガン酸化物,領域8(強相関系:高温超伝導,強相関f電子系など))
- Strontium Isotope Effects Observed in Liquid Chromatography with Crown Ether Resins
- 26aYK-7 収束電子回折法によるPr_Ca_MnO_3電荷軌道秩序相の解析(X線・粒子線(電子線),領域10,誘電体,格子欠陥,X線・粒子線,フォノン物性)
- 25pYJ-8 収束電子回折による精密構造解析(強誘電体格子系の精密制御法と新物性,領域10シンポジウム,領域10,誘電体,格子欠陥,X線・粒子線,フォノン物性)
- 27pTB-4 収束電子回折法による静電ポテンシャル分布解析 : 物性との相関(27pTB 領域7シンポジウム:物性解析技術の進歩と物質機能探索の融合を目指して,領域7(分子性固体・有機導体))
- 27aTA-9 収束電子回折法によるTbMnO_3軌道秩序相の静電ポテンシャル分布解析II(27aTA マルチフェロイック1,領域8(強相関系:高温超伝導,強相関f電子系など))
- 電子回折とX線回折を統合的に用いた物性研究
- 各種回折測定および熱分析によるLaGa_Mg_xO_の構造相図の作製 : 長周期逆位相ドメイン構造の相関係に対する影響
- Effects of Mn Dopalt on the Leakage Current Properties in SrTiO_3 Thin Films
- Space-Group Determination of a New Superconductor (Nd_Ce_x)_2(Ba_Nd_y)_2Cu_3O_ using Convergent-Beam Electron Diffraction
- Space-Group Determination of a New Superconductor (Nd_Sr_Ce_)_2CuO_ Using Convergent-Beam Electron Diffraction
- 収束電子回折法による静電ポテンシャル分布解析
- Reliability of Solder Joint with Sn-Ag-Cu-Ni-Ge Lead-Free Alloy under Heat Exposure Conditions
- A Study on Zinc Isotope Fractionation in a Benzo Crown Resin/Acetone System
- Zinc Isotope Accumulation in Liquid Chromatography with Crown Ether Resin
- Novel Syntheses Method of Phenol Type Benzo-15-Crown-5 Ether Resin and its Application for Lithium Isotope Separation
- Zinc Isotope Separation by Phenol Formaldehyde Type 15-Crown-5 Resin in Organic Solvents
- Contact Ionization Ion Sources for Ion Cyclotron Resonance Separation ( Plasma Processing)
- 25aWY-7 収束電子回折法によるAgNbO_3室温相の空間群決定(25aWY 酸化物系,領域10(誘電体格子欠陥,X線・粒子線フォノン))
- Relationship between Surface Roughness and Barrier Uniformity
- Sputter Deposition of YBa_2Cu_3O_ Thin Films with Low Gas Pressure
- Relationship between Crystal Structures and Solid Solution of Tl-Sr-Ca-Cu-O and Tl-Ba-Ca-Cu-O Superconductors
- Superconductivity of Tl-Sr-Ca-Cu-O System in Relation to Tl-Ba-Ca-Cu-O and Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
- Crystalline Structure and Superconducting Properties of Rapidly Quenched BiSrCaCu_2O_x Ceramics : Electrical Properties Condensed Matter
- In Situ Studies on X-Ray Diffraction and Resistance of Graphitelike Film during the First Redox Cycle and the Effect of 12 Crown 4
- Unique Electrical and Magnetic Properties of Pyrolyzed Poly(hydrazocarbonyl-1,4-phenylenecarbonyl) Film
- A Very-High-Conductivity of In-Doped CdTe Film : Surfaces, Interfaces and Films
- In Doping in CdTe Film by Co-Evaporation of CdTe and In
- 23aWJ-11 収束電子回折法によるSmBaMn_2O_6電荷軌道秩序相の結晶構造解析(23aWJ Mn酸化物1,領域8(強相関系:高温超伝導,強相関f電子系など))
- Low Energy Optical Excitations of CeBi : II. LOW TEMPERATURE PROPERTIES OF SOLIDS : Heavy Electrons : Experiments
- Novel Window-Structure AlGaInP Visible-Light Laser Diodes with Non-Absorbing Facets Fabricated by Utilizing GaInP Natural Superlattice Disordering
- Large (6°) Off-Angle Effects on Sublattice Ordering and Band-Gap Energy in Ga_In_P Grown on (001) GaAs Substrates
- Silicon and Selenium Doping Effects on Band-Gap Energy and Sublattice Ordering in Ga_In_P Grown by Metalorganic Vapor Phase Epitaxy
- Nonexistence of Long-Range Order in Ga_In_P Epitaxial Layers Grown on (111)B and (110) GaAs Substrates : Semiconductors and Semiconductor Devices
- Band-Gap Energy Anomaly and Sublattice Ordering in GaInP and AlGaInP Grown by Metalorganic Vapor Phase Epitaxy : Semiconductors and Semiconductor Devices
- High Aluminum Composition AlGaInP Grown by Metalorganic Chemical Vapor Deposition : Impurity Doping and 590 nm (Orange) Electroluminescence
- Enhanced Piezoelectric Property of Barium Titanate Single Crystals with Engineered Domain Configurations
- Change of Macroscopic and Microscopic Symmetry of Barium Titanate Single Crystal around Curie Temperature
- Measurement of Semiconductor Heterojunction Band Discontinuities Using Free Electron Laser
- Measurement of Semiconductor Heterojunction Band Discontinuity by Free Electron Laser
- Measurement of Band Discontinuity at ZnSe/GaAs Boundary Using Free Electron Laser
- Free Electron Laser Annealing of Amorphous Silicon Carbide
- Enhancement of Electron Mobility in Quasi-One-Dimensional Structure
- Comparative Study of C-V and Transconductance of a Si δ-Doped GaAs FET Structure
- Picosecond Photoluminescence Study of Relaxation Phenomena of Hot Electrons in a Quasi-One-Dimensional Structure
- On the Electron Mobility in Quasi-One-Dimensional Structures Fabricated by Holographic Lithography and Wet Chemical Etching
- Application of HfSiON to Deep Trench Capacitors of Sub-45nm Node Embedded DRAM
- Isotope Effect in Superconducting YBa_2Cu_3O_ System
- Synthesis of Diamond by DC Plasrna Chemical Vapor Deposition above the Surface of a Water-Ethylene Glycol Solution
- 酸化スズガスセンサ膜の微構造およびホ-ル効果の膜厚依存
- The Effect of the Particle Sizes and the Correlational Sizes of Dipoles Introduced by the Lattice Defects on the Crystal Structure of Barium Titanate Fine Particles
- Defect Structure of Heteroepitaxial SnO_2 Thin Films Grown on TiO_2 Substrates : Surfaces, Interfaces, and Films
- Local Epitaxial Growth of (103) One-Axis-Oriented SrBi_2Ta_2O_9 Thin Films Prepared at Low Deposition Temperature by Metalorganic Chemical Vapor Deposition and Their Electrical Properties
- Microstructure and Electrical Properties of Nonstoichiometric Strontium Titanate Thin Films Grown on Plantinum Electrodes
- Effect of Nonstoichiometry on Microstructure of Epitaxially Grown BaTiO_3 Thin Films
- Thermal Stability of Artificial SrTiO_3/SrO Superlattice Epitaxially Grown on SrTiO_3 Single Crystal
- Solid Solution of Epitaxially Grown(Sr, Mg)TiO_3 Thin Films
- Electrical Characterization of SrTiO_3 Thin Films Grown on Nb-Doped SrTiO_3 Single Crystals
- Artificial SrTiO_3/SrO Superlattices by Pulsed Laser Deposition
- Interface and Domain Structures of (116)-Oriented SrBi_2Ta_2O_9 Thin Film Epitaxially Grown on (110) SrTiO_3 Single Crystal
- Interface and Defect Structures of (001)-Oriented SrBi_2Ta_2O_9 Thin Film Epitaxially Grown on (001) SrTiO_3 Single Crystal
- Optical Confinement Effect for below 5 μm Thin Film Poly-Si Solar Cell on Glass Substrate
- Electrical and Optical Properties of CuInSe_2 Single Crystals Prepared by Three-Temperature-Horizontal Bridgman Method
- Growth of YBa_2Cu_3O_ Single Crystals
- Microstructure and Piezoelectric Properties of PZT Based Ceramics : F: FERROELECTRIC MATERIALS
- Thin-Film Polycrystalline Si Solar Cell on Glass Substrate Fabricated by a Novel Low Temperature Process
- Cross-Sectional Observation in (103)-Oriented YBa_2Cu_3O_x/SrTiO_3/(013)-Oriented YBa_2Cu_3O_x Tunnel Junction
- Fabrication of Tunnel Junctions with YBCO/Insulator/YBCO Layered Structure Using (013)-Oriented Films as Base Layer
- Quadrupolar Effect in Strongly Correlated Systems
- Crystal Growth of CuInSe_2 by the Method of Horizontal Bridgman with Three Temperature Zones
- Effect of Ion Doping Process on Thin-Film Transistor Characteristics Using a Bucket-Type Ion Source and XeCl Excimer Laser Annealing
- Large-Area Doping for Poly-Si Thin Film Transistors Using Bucket Ion Source with an RF Plasma Cathode
- Solid Composition of In_Ga_xAs Grown by the Halogen Transport Atomic Layer Epitaxy : Condensed Matter
- Thermally Activated Motion of a Screw Dislocation Overcoming the Peierls Potential for Prismatic Slip in an hcp Lattice
- 電子プローブを用いた構造・物性解析手法の開発と応用 (特集 地域と世界に貢献する東北大学多元物質科学研究所)
- SrS:Ce Thin-Film Electroluminescent Devices Fabricated by Post-Annealing Technique and Their Electrical Properties
- Effect of Selective Doping on the Emission Characteristics of a Heavily Si-Doped GaAs/AlGaAs Quantum Well
- ガス中蒸発法による極端に多孔質な酸化スズ膜の作製
- The VPE Growth of GaAs by the Pulsed Introduction of H_2 : Condensed Matter
- Fabrication of Barium Titanate/Strontium Titanate Artificial Superlattice by Atomic Layer Epitaxy ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Large-Area Doping Process for Fabrication of poly-Si Thin Film Transistors Using Bucket Ion Source and XeCl Excimer Laser Annealing
- TEM Observations of Initial Crystallization States for LPCVD Si Films : Condensed Matter
- Growth Temperature Dependence of Disorderings in a Be-Doped GaAs/AlAs Multilayered Structure
- Infrared Photoresponse in Semi-Insulating GaAs Diode
- Low-Field Breakdown and Negative Differential Resistance in Semi-Insulating GaAs
- 25pTM-11 収束電子回折法による(Ag,Li)NbO_3室温相の空間群決定(25pTM リラクサー,酸化物系,ペロブスカイト,領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 27pED-3 収束電子回折法によるSmBaMn_2O_6電荷軌道秩序相の結晶構造解析II(27pED マンガン系物質(マンガン酸化物(構造),遷移金属ニクタイド),領域8(強相関係:高温超伝導,強相関f電子系など))
- Effects of Manganese Addition on Piezoelectric Properties of Pb(Zr_Ti_)O_3
- Optically Writable and Erasable Memory in Semi-Insulating GaAs
- Galvanomagnetic Behavior of Hot Electrons in Semi-Insulating GaAs
- Deep Electron Traps in AlAs-GaAs Superlattices as Studied by Deep-Level Transient Spectroscopy
- 27pTM-10 収束電子回折法による六方晶YMnO_3の強誘電ドメイン壁の観察(27pTM 酸化物系,光散乱,領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- Amperometric Oxygen Sensors Based on PbSnF_4. Electrical Conductivity of the Conductive Fiber Incorporated in the Sensing Electrode on Response Time
- 22aGN-8 収束電子回折法による六方晶YMnO_3強誘電相の静電ポテンシャル分布解析(22aGN マルチフェロイック,領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 22aGN-7 収束電子回折法による六方晶YMnO_3の強誘電ドメイン壁の観察II(22aGN マルチフェロイック,領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 21aJA-2 ロッキングX線ICPによる局所対称性の研究(21aJA X線・粒子線(電子線・陽電子),領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- 22pGN-10 収束電子回折法による(Ag, Li)NbO_3室温相の結晶構造解析(22pGN 酸化物・ペロヴスカイト,領域10(誘電体,格子欠陥,X線・粒子線,フォノン))
- Calcium isotope fractionation in liquid chromatography with crown ether resins
- 分光収束電子回折法による精密結晶構造解析法の開発