Electric Properties of Zinc Oxide Epitaxial Films Grown by Ion-Beam Sputtering with Oxygen-Radical Irradiation
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概要
- 論文の詳細を見る
Undoped and aluminum-doped ZnO epitaxial films were grown on (001) sapphire substrates by an ion-beam sputtering method with or without the irradiation of oxygen radicals. The effect of oxygen-radical irradiation was notable in the undoped ZnO films when the growth temperature was relatively low. The irradiation improved the crystallinity and decreased the oxygen-vacancy concentration, while it induced internal stress into the films. The carrier concentration of the undoped ZnO films was decreased by the oxygen-radical irradiation, which was attributable to a decrease in the oxygen-vacancy concentration. The Hall mobility of the undoped ZnO films was as low as 1-3 cm^2 V^<-1> s^<-1>. The low mobility was explained by carrier scattering due to the potential barriers at the grain boundaries. The height of the potential barriers at the grain boundaries decreased with increasing carrier concentration. This behavior was well explained by a simple model assuming a single defect state at grain boundaries.
- 社団法人応用物理学会の論文
- 1999-06-15
著者
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Ohdaira Toshiyuki
National Institute Of Advanced Industrial Science And Technology
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Ohdaira Toshiyuki
Department Of Nuclear Engineering Kyoto University
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TSURUMI Takaaki
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Ohashi Naoki
Department of Inorganic Materials, Graduate School of Science and Engineering, Tokyo Institute of Te
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Tsurumi Takaaki
Department of Inorganic Materials, Graduate School of Science and Engineering, Tokyo Institute of Te
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Ohshima Takeshi
Japan Atomic Energy Research Institute (jaeri)
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Ohdaira Toshiyuki
National Institute Of Advanced Industrial Science And Technology (aist)
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Ohashi N
National Inst. For Materials Sci.
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Ohgaki Takeshi
Department of Metallurgy and Ceramic Science, Graduate School of Science and Engineering, Tokyo Inst
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Ohgaki Takeshi
National Inst. For Materials Sci.
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Ohashi Naoki
Department Of Cardiology Nagoya University Graduate School Of Medicine
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Tsurumi T
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Tsurumi Takaaki
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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NISHIZAWA Shuichi
Department of Inorganic Materials, Tokyo Institute of Technology
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Ohgaki T
National Institute For Materials Science (nims)
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Nishizawa Shuichi
Department Of Inorganic Materials Tokyo Institute Of Technology
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Tsurumi Takaaki
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering Tokyo Insti
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Ohashi Naoki
Optical and Electronic Materials Unit, National Institute for Materials Science
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