Analysis of Interfacial Phase between Substrates and Lead Zireonate Titanate Thin Films Synthesized by Hydrothermal Method (<Special Issue> FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
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概要
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Hydrothermal synthesis of lead zirconate titanate (PZT) films was achieved using two sequential processes. The first step is the reaction of the substrate with a solution, which is called the "nucleation process", and the second step is the "crystal growth process". Variation in the morphology of final products was produced by changing the duration of the nucleation process. At least 12 h of the nucleation process was required to obtain a PZT film. A duration over 12 h in the nucleation process resulted in thicker PZT film and larger displacement of the bending actuator fabricated using such a film. These findings can be explained by assuming the existence of an interfacial phase between the Ti substrate and PZT film, the piezoelectric constant of which would be lower than that of the PZT film. Energy dispersive X-ray spectrometry (EDX) analyses provide evidence to support the assumption that the interfacial phase is Ti-rich PZT.
- 社団法人応用物理学会の論文
- 1994-09-30
著者
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TSURUMI Takaaki
Graduate School of Science and Engineering, Tokyo Institute of Technology
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DAIMON Masaki
Department of Inorganic materials, Faculty of Engineering, Tokyo Institute of Technology
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Daimon M
Tokyo Inst. Technol. Tokyo
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Tsurumi T
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Tsurumi Takaaki
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Arita Koji
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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OHBA Yoko
Department of Inorganic Materials, Faculty of Engineering, Tokyo Institute of Technology
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Ohba Yasuyuki
Department Of Inorganic Materials Faculty Of Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering Tokyo Insti
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Ohba Yoko
Department Of Gynecology Hokkaido University Graduate School Of Medicine
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