24-O-03 Aerosol Deposition Process for Low Temperature Fabrication of RF-Modules
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Nam S‐m
Tokyo Inst. Technol. Tokyo Jpn
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TSURUMI Takaaki
Graduate School of Science and Engineering, Tokyo Institute of Technology
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NAM Song
Advanced Process Technology Group, National Institute of Advanced Industrial Science and Technology
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KAKEMOTO Hirofumi
Graduate School of Science and Engineering, Tokyo Institute of Technology
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WADA Satoshi
Graduate School of Science and Engineering, Tokyo Institute of Technology
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AKEDO Jun
Advanced Process Technology Group, National Institute of Advanced Industrial Science and Technology
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