Spatial Resolution for Dielectric Measurement Using Non-Contact Microwave Probe and In-Plane Dielectric Mappings for Dielectric Device
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概要
- 論文の詳細を見る
The spatial resolution of dielectric measurement using a non-contact microwave probe was improved the basis of Kirchhoff's diffraction formula with decreasing diameters of the coaxial cable and probe. Using reflection intensity mappings, the dielectric permittivity distribution in micro-region at 9.4 GHz was measured for the cross section of a multi-layer ceramic capacitor at room temperature. The spatial resolution was experimentally estimated to be about 10 μm from mappings of the dielectric and inner electrode layers in the multi-layer ceramic capacitor.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2006-09-30
著者
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KAKEMOTO Hirofumi
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Wada Satoshi
Graduate School Of Fisheries Sciences Hokkaido University
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Nam Song-min
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Harigai Takakiyo
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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Li Jianyong
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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Nam Song-Min
Graduate School of Science and Engineering, Tokyo Institute of Technology, 2-12-1 Ookayama, Meguro, Tokyo 152-8552, Japan
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Tsurumi Takaaki
Graduate School of Materials Science and Technology, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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