Heat-cycle endurance and in-plane thermal expansion of Al_2O_3/Al substrates formed by aerosol deposition method
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概要
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A new heat radiation substrate for high power modules has been proposed by utilizing Al_2O_3 thick films formed by the aerosol deposition method (ADM) on Al substrates. Dense Al_2O_3 thick films (AD-Al_2O_3) could be obtained by the ADM at room temperature. A heat-cycle endurance test between -80℃ and 180℃ revealed that the AD-Al_2O_3/Al substrates were superior to the conventional direct brazed aluminum (DBA) substrates using AlN ceramics bounded to Al substrates. No lamination was observed between the AD-Al_2O_3 films and Al substrates after heat-cycle test in spite of the difference of thermal expansion coefficient between Al_2O_3 and Al. The in-plane thermal expansion coefficient of AD-Al_2O_3 films was almost the same as that of Al substrates, indicating that plastic deformation was induced in the AD-Al_2O_3 films consisting of nano-sized grains to relax the stress caused by the difference of thermal expansion coefficient.
- 2008-12-01
著者
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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TSURUMI Takaaki
Graduate School of Science and Engineering, Tokyo Institute of Technology
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KAKEMOTO Hirofumi
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Hoshina Takuya
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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HOSHINA Takuya
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Takeda Hiroaki
Graduate School of Science and Technology, Tokyo Institute of Technology
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SAKAMAKI Ryo
Graduate School of Science and Engineering, Tokyo Institute of Technology
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YASUDA Kouichi
Graduate School of Science and Engineering, Tokyo Institute of Technology
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Akedo Jun
National Institute Of Advanced Industrial Science And Technology
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Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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Kakemoto Hirofumi
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering Tokyo Insti
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Hirofumi Kakemoto
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering
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Hoshina Takuya
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Akedo J
National Institute Of Advanced Industrial Science And Technology (aist)
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Sakamaki Ryo
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Yasuda Kouichi
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Hoshina Takuya
Department Of Metallurgy And Ceramics Science Tokyo Institute Of Technology
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Kakemoto Hirofumi
Dep. Of Metallurgy And Ceramics Sci. Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Tsurumi T
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Tsurumi Takaaki
The Graduate School Of Sci. And Engineering Tokyo Inst. Of Technol.
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Tsurumi Takaaki
Graduate School Of Science And Engineering Tokyo Institute Of Technology
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Tsurumi Takaaki
Department Of Metallurgy And Ceramics Science Graduate School Of Science And Engineering Tokyo Insti
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Takeda Hiroaki
Graduate School Of Materials Science Nara Institute Of Science And Technology (naist)
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Takeda Hiroaki
Graduate School of Material Science, Nara Institute of Science and Technology (NAIST), 8916-5 Takayama-cho, Ikoma, Nara 630-0192, Japan
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Tsurumi Takaaki
Graduate School of Materials Science and Technology, Tokyo Institute of Technology, Meguro, Tokyo 152-8552, Japan
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