Fabrication and Characterization of Optical Micro-Electro-Mechanical System Scanning Devices Using BaTiO<sub>3</sub>-Based Lead-Free Piezoelectric-Coated Substrate Sheet by Aerosol Deposition
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概要
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We demonstrated high-speed metal-based Lamb-wave-resonance piezoelectric-drive optical micro-electric-mechanical system (MEMS) scanning devices using lead-free piezoelectric direct coated substrate sheets. The BaTiO<sub>3</sub>-based lead-free piezoelectric direct coated substrate sheet prepared by aerosol deposition achieved a piezoelectric $d_{31}$ of approximately $-138$ pm/V. The metal-based optical scanning devices have a 1 mm circular mirror. Under the ambient air, the wide optical scanning angle of 58° and the high resonance frequency of 26.681 kHz were achieved at the applied voltage of less than 30 V.
- 2011-09-25
著者
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Park Jae-Hyuk
National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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Kawakami Yoshihiro
National Institutes of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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Suzuki Muneyasu
National Institutes of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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Park Jae-Hyuk
National Institutes of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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Akedo Jun
National Institutes of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki 305-8564, Japan
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