Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films
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概要
- 論文の詳細を見る
The influence of a pre-process for a starting powder in the deposition of ferroelectric thick films using the aerosol deposition method (ADM) was investigated. When a dry-milling procedure was introduced to the preparation of the ferroelectric powder, the deposition rate of ADM increased significantly up to 30-fold and reached 73 μm/min for a 5 mm^2 area. However, density and electrical properties of the thick film decreased. If heat treatment at 800℃ for 4 h was additionally introduced to the pre-process of the starting powder, the deposition rate increased up to 7-10-fold as compared with that for a starting powder and the electrical properties were improved from P_r = 20μC/cm^2 at E_c = 50kV/cm tO_32 μC/cm^2 at E_c = 45 kV/cm.
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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