06-P-14 Integration of PZT Thick Film for MEMS Application with Aerosol Deposition Method
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Lebedev M
National Institute Of Advanced Industrial Science And Technology (aist)
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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BABA So
National Institute of Advanced Industrial Science and Technology (AIST)
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ASAI Nobuaki
Brother Industries, Ltd.
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