01-P-45 Formation of Solid Aluminum Nitride Film with Aerosol Deposition Method
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概要
- 論文の詳細を見る
- 日本セラミックス協会の論文
- 2003-09-29
著者
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Lebedev M
National Institute Of Advanced Industrial Science And Technology (aist)
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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IWATA Atsushi
National Institute of Advanced Industrial Science and Technology, Institute of Mechanical Systems En
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