Aerosol Deposition Method for Preparation of Lead Zirconate Titanate Thick Layer at Low Temperature —Improvement of Electrical Properties by Irradiation of Fast Atom Beam and Plasma—
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概要
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The improvement of the electrical properties of a lead zirconate titanate (PZT) layer and the reduction of the processing temperature in the aerosol deposition method (ADM) using irradiation of a fast atom beam (FAB) and plasma were investigated. The remanent polarization of the PZT layer deposited with oxygen FAB irradiation on a stainless steel substrate and annealed at 400°C for 10 min was 15 μC/cm2 which is 2 times higher than that without FAB irradiation. The dielectric permittivity ($\varepsilon$) at 1 kHz–1 MHz was also improved by 25–45% by FAB irradiation for PZT layers, both as-deposited at room temperature and annealed at up to 400°C.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 2003-09-15
著者
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Lebedev Maxim
National Institute Of Advanced Industrial Science And Technology (aist)
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BABA So
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Lebedev Maxim
National Institute of Advanced Industrial Science and Technology (AIST), 1-2-1 Namiki, Tsukuba, Ibaraki 305-8564, Japan
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