Aerosol Deposition on Transparent Electro-Optic Films for Optical Modulators(Micro/Nano Fabrication,<Special Section>Microoptomechatronics)
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概要
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Complex thin oxide films with electro-optic (EO) properties are promising for use in advanced optical devices because of their large EO effect. We developed a method of aerosol deposition (AD) for fabricating EO films. The mechanism for AD is based on the solidification by impact of submicron particles onto a substrate. Since particles in AD films preserve their crystalline structure during the formation of film, epitaxial growth is not necessary for exhibiting the EO effect. Highly transparent Pb(Zr,Ti)O_3 films, which have acceptable transmittance loss for use as optical devices, were directly deposited on glass substrates by AD. We found the Pb(Zr,Ti)O_3 film by AD produced a fairly high EO coefficient (>150pm/V), approximately 10 times larger than that of LiNbO_3. A Fabry-Perot (FP) optical modulator was developed with EO films fabricated by AD. We demonstrated the modulation of optical intensity with an electrical field applied to an EO film made of ferroelectric Pb(Zr,Ti)O_3.
- 社団法人電子情報通信学会の論文
- 2007-01-01
著者
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OHASHI Keishi
MIRAI-Selete
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Tsuda Hiroki
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
National Institute of Advanced Industrial Science and Technology (AIST)
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Akedo Jun
Mechanical Engineering Laboratory Agency Of Industrial Science And Technology Ministry Of Internatio
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NAKADA Masafumi
Fundamental Research Laboratories, NEC Corporation
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OHASHI Keishi
Fundamental Research Laboratories, NEC Corporation
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Tsuda Hiroki
National Institutes Of Advanced Industrial Science And Technology
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Ohashi Keishi
Fundamental And Environmental Research Laboratories Nec Corporation
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Nakada Masafumi
Fundamental Research Laboratories Nec Corporation
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Akedo Jun
National Inst. Of Advanced Industrial Sci. And Technol. (aist) Ibaraki Jpn
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Akedo Jun
National Institutes Of Advanced Industrial Science And Technology
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Nakada Masafumi
Nano Electronics Res. Labs. Nec Corp.
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Nakada Masafumi
Fundamental And Environmental Research Laboratories Nec Corporation
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OHASHI Keishi
Fundamental and Environmental Research Laboratories, NEC Corporation
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